1/31/2012	8:23:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/31/2012	8:23:36 AM	Recipe started at 8:23 AM
1/31/2012	8:23:36 AM	Helium valve closed
1/31/2012	8:23:36 AM	H2 valve closed
1/31/2012	8:23:36 AM	BCl3 valve closed
1/31/2012	8:23:36 AM	PH3 valve closed
1/31/2012	8:23:36 AM	SiCl4 pre valve closed
1/31/2012	8:23:36 AM	SiCl4 post valve closed
1/31/2012	8:23:36 AM	Main Vac valve closed
1/31/2012	8:23:36 AM	Bypass valve closed
1/31/2012	8:23:36 AM	Bubbler valve closed
1/31/2012	8:23:36 AM	Helium MFC set to  0.000000
1/31/2012	8:23:36 AM	H2 MFC set to  0.000000
1/31/2012	8:23:36 AM	BCl3 MFC set to  0.000000
1/31/2012	8:23:36 AM	PH3 MFC set to  0.000000
1/31/2012	8:23:36 AM	SiCl4 MFC set to  0.000000
1/31/2012	8:23:36 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	8:23:36 AM	Tube furnace set to 0
1/31/2012	8:23:39 AM	H2 valve closed
1/31/2012	8:23:39 AM	BCl3 valve closed
1/31/2012	8:23:39 AM	PH3 valve closed
1/31/2012	8:23:39 AM	SiCl4 pre valve closed
1/31/2012	8:23:39 AM	SiCl4 post valve closed
1/31/2012	8:23:39 AM	Main Vac valve closed
1/31/2012	8:23:39 AM	Bypass valve closed
1/31/2012	8:23:39 AM	Bubbler valve closed
1/31/2012	8:23:39 AM	Helium valve opened
1/31/2012	8:23:39 AM	Helium MFC set to  500.000000
1/31/2012	8:23:39 AM	H2 MFC set to  0.000000
1/31/2012	8:23:39 AM	BCl3 MFC set to  0.000000
1/31/2012	8:23:39 AM	PH3 MFC set to  0.000000
1/31/2012	8:23:39 AM	SiCl4 MFC set to  0.000000
1/31/2012	8:23:39 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	8:23:39 AM	Tube furnace set to 0
1/31/2012	8:24:01 AM	Helium valve closed
1/31/2012	8:24:01 AM	H2 valve closed
1/31/2012	8:24:01 AM	BCl3 valve closed
1/31/2012	8:24:01 AM	PH3 valve closed
1/31/2012	8:24:01 AM	SiCl4 pre valve closed
1/31/2012	8:24:01 AM	SiCl4 post valve closed
1/31/2012	8:24:01 AM	Main Vac valve closed
1/31/2012	8:24:01 AM	Bypass valve closed
1/31/2012	8:24:01 AM	Bubbler valve closed
1/31/2012	8:24:01 AM	Helium MFC set to  0.000000
1/31/2012	8:24:01 AM	H2 MFC set to  0.000000
1/31/2012	8:24:01 AM	BCl3 MFC set to  0.000000
1/31/2012	8:24:01 AM	PH3 MFC set to  0.000000
1/31/2012	8:24:01 AM	SiCl4 MFC set to  0.000000
1/31/2012	8:24:01 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	8:24:02 AM	Tube furnace set to 0
1/31/2012	8:24:03 AM	Run finished at 8:24 AM
1/31/2012	8:24:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/31/2012	8:32:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/31/2012	8:32:10 AM	Recipe started at 8:32 AM
1/31/2012	8:32:10 AM	Helium valve closed
1/31/2012	8:32:10 AM	H2 valve closed
1/31/2012	8:32:10 AM	BCl3 valve closed
1/31/2012	8:32:10 AM	PH3 valve closed
1/31/2012	8:32:10 AM	SiCl4 pre valve closed
1/31/2012	8:32:10 AM	SiCl4 post valve closed
1/31/2012	8:32:10 AM	Main Vac valve closed
1/31/2012	8:32:10 AM	Bubbler valve closed
1/31/2012	8:32:10 AM	Bypass valve opened
1/31/2012	8:32:10 AM	Helium MFC set to  0.000000
1/31/2012	8:32:10 AM	H2 MFC set to  0.000000
1/31/2012	8:32:10 AM	BCl3 MFC set to  0.000000
1/31/2012	8:32:10 AM	PH3 MFC set to  0.000000
1/31/2012	8:32:10 AM	SiCl4 MFC set to  0.000000
1/31/2012	8:32:10 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	8:32:10 AM	Tube furnace set to 0
1/31/2012	8:33:43 AM	Run aborted at 8:33 AM
1/31/2012	8:33:43 AM	Helium valve closed
1/31/2012	8:33:43 AM	H2 valve closed
1/31/2012	8:33:43 AM	BCl3 valve closed
1/31/2012	8:33:43 AM	PH3 valve closed
1/31/2012	8:33:43 AM	SiCl4 pre valve closed
1/31/2012	8:33:43 AM	SiCl4 post valve closed
1/31/2012	8:33:43 AM	Bypass valve closed
1/31/2012	8:33:43 AM	Main Vac valve closed
1/31/2012	8:33:43 AM	Bubbler valve closed
1/31/2012	8:33:43 AM	Helium MFC set to  0.000000
1/31/2012	8:33:43 AM	H2 MFC set to  0.000000
1/31/2012	8:33:43 AM	BCl3 MFC set to  0.000000
1/31/2012	8:33:43 AM	PH3 MFC set to  0.000000
1/31/2012	8:33:43 AM	SiCl4 MFC set to  0.000000
1/31/2012	8:33:43 AM	Tube furnace set to 0
1/31/2012	8:33:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/31/2012	8:33:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/31/2012	8:33:46 AM	Recipe started at 8:33 AM
1/31/2012	8:33:46 AM	Helium valve closed
1/31/2012	8:33:46 AM	H2 valve closed
1/31/2012	8:33:46 AM	BCl3 valve closed
1/31/2012	8:33:46 AM	PH3 valve closed
1/31/2012	8:33:46 AM	SiCl4 pre valve closed
1/31/2012	8:33:46 AM	SiCl4 post valve closed
1/31/2012	8:33:46 AM	Main Vac valve closed
1/31/2012	8:33:46 AM	Bypass valve closed
1/31/2012	8:33:46 AM	Bubbler valve closed
1/31/2012	8:33:46 AM	Helium MFC set to  0.000000
1/31/2012	8:33:46 AM	H2 MFC set to  0.000000
1/31/2012	8:33:46 AM	BCl3 MFC set to  0.000000
1/31/2012	8:33:46 AM	PH3 MFC set to  0.000000
1/31/2012	8:33:46 AM	SiCl4 MFC set to  0.000000
1/31/2012	8:33:46 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	8:33:46 AM	Tube furnace set to 0
1/31/2012	8:33:49 AM	H2 valve closed
1/31/2012	8:33:49 AM	BCl3 valve closed
1/31/2012	8:33:49 AM	PH3 valve closed
1/31/2012	8:33:49 AM	SiCl4 pre valve closed
1/31/2012	8:33:49 AM	SiCl4 post valve closed
1/31/2012	8:33:49 AM	Main Vac valve closed
1/31/2012	8:33:49 AM	Bypass valve closed
1/31/2012	8:33:49 AM	Bubbler valve closed
1/31/2012	8:33:49 AM	Helium valve opened
1/31/2012	8:33:49 AM	Helium MFC set to  500.000000
1/31/2012	8:33:49 AM	H2 MFC set to  0.000000
1/31/2012	8:33:49 AM	BCl3 MFC set to  0.000000
1/31/2012	8:33:49 AM	PH3 MFC set to  0.000000
1/31/2012	8:33:49 AM	SiCl4 MFC set to  0.000000
1/31/2012	8:33:49 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	8:33:49 AM	Tube furnace set to 0
1/31/2012	8:34:16 AM	Helium valve closed
1/31/2012	8:34:16 AM	H2 valve closed
1/31/2012	8:34:16 AM	BCl3 valve closed
1/31/2012	8:34:16 AM	PH3 valve closed
1/31/2012	8:34:16 AM	SiCl4 pre valve closed
1/31/2012	8:34:16 AM	SiCl4 post valve closed
1/31/2012	8:34:16 AM	Main Vac valve closed
1/31/2012	8:34:16 AM	Bypass valve closed
1/31/2012	8:34:16 AM	Bubbler valve closed
1/31/2012	8:34:16 AM	Helium MFC set to  0.000000
1/31/2012	8:34:16 AM	H2 MFC set to  0.000000
1/31/2012	8:34:16 AM	BCl3 MFC set to  0.000000
1/31/2012	8:34:16 AM	PH3 MFC set to  0.000000
1/31/2012	8:34:16 AM	SiCl4 MFC set to  0.000000
1/31/2012	8:34:16 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	8:34:16 AM	Tube furnace set to 0
1/31/2012	8:34:17 AM	Run finished at 8:34 AM
1/31/2012	8:34:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/31/2012	8:38:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/31/2012	8:38:27 AM	Recipe started at 8:38 AM
1/31/2012	8:38:27 AM	Helium valve closed
1/31/2012	8:38:27 AM	H2 valve closed
1/31/2012	8:38:27 AM	BCl3 valve closed
1/31/2012	8:38:27 AM	PH3 valve closed
1/31/2012	8:38:27 AM	SiCl4 pre valve closed
1/31/2012	8:38:27 AM	SiCl4 post valve closed
1/31/2012	8:38:27 AM	Main Vac valve closed
1/31/2012	8:38:27 AM	Bubbler valve closed
1/31/2012	8:38:27 AM	Bypass valve opened
1/31/2012	8:38:27 AM	Helium MFC set to  0.000000
1/31/2012	8:38:27 AM	H2 MFC set to  0.000000
1/31/2012	8:38:27 AM	BCl3 MFC set to  0.000000
1/31/2012	8:38:27 AM	PH3 MFC set to  0.000000
1/31/2012	8:38:27 AM	SiCl4 MFC set to  0.000000
1/31/2012	8:38:27 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	8:38:27 AM	Tube furnace set to 0
1/31/2012	8:45:54 AM	Run aborted at 8:45 AM
1/31/2012	8:45:54 AM	Helium valve closed
1/31/2012	8:45:54 AM	H2 valve closed
1/31/2012	8:45:54 AM	BCl3 valve closed
1/31/2012	8:45:54 AM	PH3 valve closed
1/31/2012	8:45:54 AM	SiCl4 pre valve closed
1/31/2012	8:45:54 AM	SiCl4 post valve closed
1/31/2012	8:45:54 AM	Bypass valve closed
1/31/2012	8:45:54 AM	Main Vac valve closed
1/31/2012	8:45:54 AM	Bubbler valve closed
1/31/2012	8:45:54 AM	Helium MFC set to  0.000000
1/31/2012	8:45:54 AM	H2 MFC set to  0.000000
1/31/2012	8:45:54 AM	BCl3 MFC set to  0.000000
1/31/2012	8:45:54 AM	PH3 MFC set to  0.000000
1/31/2012	8:45:54 AM	SiCl4 MFC set to  0.000000
1/31/2012	8:45:55 AM	Tube furnace set to 0
1/31/2012	8:45:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/31/2012	8:45:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/31/2012	8:45:59 AM	Recipe started at 8:45 AM
1/31/2012	8:45:59 AM	Helium valve closed
1/31/2012	8:45:59 AM	H2 valve closed
1/31/2012	8:45:59 AM	BCl3 valve closed
1/31/2012	8:45:59 AM	PH3 valve closed
1/31/2012	8:45:59 AM	SiCl4 pre valve closed
1/31/2012	8:45:59 AM	SiCl4 post valve closed
1/31/2012	8:45:59 AM	Main Vac valve closed
1/31/2012	8:45:59 AM	Bypass valve closed
1/31/2012	8:45:59 AM	Bubbler valve closed
1/31/2012	8:45:59 AM	Helium MFC set to  0.000000
1/31/2012	8:45:59 AM	H2 MFC set to  0.000000
1/31/2012	8:45:59 AM	BCl3 MFC set to  0.000000
1/31/2012	8:45:59 AM	PH3 MFC set to  0.000000
1/31/2012	8:45:59 AM	SiCl4 MFC set to  0.000000
1/31/2012	8:45:59 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	8:45:59 AM	Tube furnace set to 0
1/31/2012	8:46:02 AM	H2 valve closed
1/31/2012	8:46:02 AM	BCl3 valve closed
1/31/2012	8:46:02 AM	PH3 valve closed
1/31/2012	8:46:02 AM	SiCl4 pre valve closed
1/31/2012	8:46:02 AM	SiCl4 post valve closed
1/31/2012	8:46:02 AM	Main Vac valve closed
1/31/2012	8:46:02 AM	Bypass valve closed
1/31/2012	8:46:02 AM	Bubbler valve closed
1/31/2012	8:46:02 AM	Helium valve opened
1/31/2012	8:46:02 AM	Helium MFC set to  500.000000
1/31/2012	8:46:02 AM	H2 MFC set to  0.000000
1/31/2012	8:46:02 AM	BCl3 MFC set to  0.000000
1/31/2012	8:46:02 AM	PH3 MFC set to  0.000000
1/31/2012	8:46:02 AM	SiCl4 MFC set to  0.000000
1/31/2012	8:46:02 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	8:46:02 AM	Tube furnace set to 0
1/31/2012	8:47:06 AM	Helium valve closed
1/31/2012	8:47:06 AM	H2 valve closed
1/31/2012	8:47:06 AM	BCl3 valve closed
1/31/2012	8:47:06 AM	PH3 valve closed
1/31/2012	8:47:06 AM	SiCl4 pre valve closed
1/31/2012	8:47:06 AM	SiCl4 post valve closed
1/31/2012	8:47:06 AM	Main Vac valve closed
1/31/2012	8:47:06 AM	Bypass valve closed
1/31/2012	8:47:06 AM	Bubbler valve closed
1/31/2012	8:47:06 AM	Helium MFC set to  0.000000
1/31/2012	8:47:06 AM	H2 MFC set to  0.000000
1/31/2012	8:47:06 AM	BCl3 MFC set to  0.000000
1/31/2012	8:47:06 AM	PH3 MFC set to  0.000000
1/31/2012	8:47:06 AM	SiCl4 MFC set to  0.000000
1/31/2012	8:47:06 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	8:47:06 AM	Tube furnace set to 0
1/31/2012	8:47:07 AM	Run finished at 8:47 AM
1/31/2012	8:47:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/31/2012	8:51:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/31/2012	8:51:26 AM	Recipe started at 8:51 AM
1/31/2012	8:51:26 AM	Helium valve closed
1/31/2012	8:51:26 AM	H2 valve closed
1/31/2012	8:51:26 AM	BCl3 valve closed
1/31/2012	8:51:26 AM	PH3 valve closed
1/31/2012	8:51:26 AM	SiCl4 pre valve closed
1/31/2012	8:51:26 AM	SiCl4 post valve closed
1/31/2012	8:51:26 AM	Main Vac valve closed
1/31/2012	8:51:26 AM	Bubbler valve closed
1/31/2012	8:51:26 AM	Bypass valve opened
1/31/2012	8:51:26 AM	Helium MFC set to  0.000000
1/31/2012	8:51:26 AM	H2 MFC set to  0.000000
1/31/2012	8:51:26 AM	BCl3 MFC set to  0.000000
1/31/2012	8:51:26 AM	PH3 MFC set to  0.000000
1/31/2012	8:51:26 AM	SiCl4 MFC set to  0.000000
1/31/2012	8:51:26 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	8:51:26 AM	Tube furnace set to 0
1/31/2012	8:56:43 AM	Run aborted at 8:56 AM
1/31/2012	8:56:43 AM	Helium valve closed
1/31/2012	8:56:43 AM	H2 valve closed
1/31/2012	8:56:43 AM	BCl3 valve closed
1/31/2012	8:56:43 AM	PH3 valve closed
1/31/2012	8:56:43 AM	SiCl4 pre valve closed
1/31/2012	8:56:43 AM	SiCl4 post valve closed
1/31/2012	8:56:43 AM	Bypass valve closed
1/31/2012	8:56:43 AM	Main Vac valve closed
1/31/2012	8:56:43 AM	Bubbler valve closed
1/31/2012	8:56:43 AM	Helium MFC set to  0.000000
1/31/2012	8:56:43 AM	H2 MFC set to  0.000000
1/31/2012	8:56:43 AM	BCl3 MFC set to  0.000000
1/31/2012	8:56:43 AM	PH3 MFC set to  0.000000
1/31/2012	8:56:43 AM	SiCl4 MFC set to  0.000000
1/31/2012	8:56:43 AM	Tube furnace set to 0
1/31/2012	8:56:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/31/2012	8:56:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/31/2012	8:56:55 AM	Recipe started at 8:56 AM
1/31/2012	8:56:55 AM	Helium valve closed
1/31/2012	8:56:55 AM	H2 valve closed
1/31/2012	8:56:55 AM	BCl3 valve closed
1/31/2012	8:56:55 AM	PH3 valve closed
1/31/2012	8:56:55 AM	SiCl4 pre valve closed
1/31/2012	8:56:55 AM	SiCl4 post valve closed
1/31/2012	8:56:55 AM	Main Vac valve closed
1/31/2012	8:56:55 AM	Bypass valve closed
1/31/2012	8:56:55 AM	Bubbler valve closed
1/31/2012	8:56:55 AM	Helium MFC set to  0.000000
1/31/2012	8:56:55 AM	H2 MFC set to  0.000000
1/31/2012	8:56:55 AM	BCl3 MFC set to  0.000000
1/31/2012	8:56:55 AM	PH3 MFC set to  0.000000
1/31/2012	8:56:55 AM	SiCl4 MFC set to  0.000000
1/31/2012	8:56:55 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	8:56:55 AM	Tube furnace set to 0
1/31/2012	8:56:58 AM	H2 valve closed
1/31/2012	8:56:58 AM	BCl3 valve closed
1/31/2012	8:56:58 AM	PH3 valve closed
1/31/2012	8:56:58 AM	SiCl4 pre valve closed
1/31/2012	8:56:58 AM	SiCl4 post valve closed
1/31/2012	8:56:58 AM	Main Vac valve closed
1/31/2012	8:56:58 AM	Bypass valve closed
1/31/2012	8:56:58 AM	Bubbler valve closed
1/31/2012	8:56:58 AM	Helium valve opened
1/31/2012	8:56:58 AM	Helium MFC set to  500.000000
1/31/2012	8:56:58 AM	H2 MFC set to  0.000000
1/31/2012	8:56:58 AM	BCl3 MFC set to  0.000000
1/31/2012	8:56:58 AM	PH3 MFC set to  0.000000
1/31/2012	8:56:58 AM	SiCl4 MFC set to  0.000000
1/31/2012	8:56:58 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	8:56:58 AM	Tube furnace set to 0
1/31/2012	8:58:02 AM	Helium valve closed
1/31/2012	8:58:02 AM	H2 valve closed
1/31/2012	8:58:02 AM	BCl3 valve closed
1/31/2012	8:58:02 AM	PH3 valve closed
1/31/2012	8:58:02 AM	SiCl4 pre valve closed
1/31/2012	8:58:02 AM	SiCl4 post valve closed
1/31/2012	8:58:02 AM	Main Vac valve closed
1/31/2012	8:58:02 AM	Bypass valve closed
1/31/2012	8:58:02 AM	Bubbler valve closed
1/31/2012	8:58:02 AM	Helium MFC set to  0.000000
1/31/2012	8:58:02 AM	H2 MFC set to  0.000000
1/31/2012	8:58:02 AM	BCl3 MFC set to  0.000000
1/31/2012	8:58:02 AM	PH3 MFC set to  0.000000
1/31/2012	8:58:02 AM	SiCl4 MFC set to  0.000000
1/31/2012	8:58:02 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	8:58:02 AM	Tube furnace set to 0
1/31/2012	8:58:03 AM	Run finished at 8:58 AM
1/31/2012	8:58:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/31/2012	9:03:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/31/2012	9:03:42 AM	Recipe started at 9:03 AM
1/31/2012	9:03:42 AM	Helium valve closed
1/31/2012	9:03:42 AM	H2 valve closed
1/31/2012	9:03:42 AM	BCl3 valve closed
1/31/2012	9:03:42 AM	PH3 valve closed
1/31/2012	9:03:42 AM	SiCl4 pre valve closed
1/31/2012	9:03:42 AM	SiCl4 post valve closed
1/31/2012	9:03:42 AM	Main Vac valve closed
1/31/2012	9:03:42 AM	Bubbler valve closed
1/31/2012	9:03:42 AM	Bypass valve opened
1/31/2012	9:03:42 AM	Helium MFC set to  0.000000
1/31/2012	9:03:42 AM	H2 MFC set to  0.000000
1/31/2012	9:03:42 AM	BCl3 MFC set to  0.000000
1/31/2012	9:03:42 AM	PH3 MFC set to  0.000000
1/31/2012	9:03:42 AM	SiCl4 MFC set to  0.000000
1/31/2012	9:03:42 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	9:03:42 AM	Tube furnace set to 0
1/31/2012	9:06:37 AM	Run aborted at 9:06 AM
1/31/2012	9:06:37 AM	Helium valve closed
1/31/2012	9:06:37 AM	H2 valve closed
1/31/2012	9:06:37 AM	BCl3 valve closed
1/31/2012	9:06:37 AM	PH3 valve closed
1/31/2012	9:06:37 AM	SiCl4 pre valve closed
1/31/2012	9:06:37 AM	SiCl4 post valve closed
1/31/2012	9:06:37 AM	Bypass valve closed
1/31/2012	9:06:37 AM	Main Vac valve closed
1/31/2012	9:06:37 AM	Bubbler valve closed
1/31/2012	9:06:37 AM	Helium MFC set to  0.000000
1/31/2012	9:06:37 AM	H2 MFC set to  0.000000
1/31/2012	9:06:37 AM	BCl3 MFC set to  0.000000
1/31/2012	9:06:37 AM	PH3 MFC set to  0.000000
1/31/2012	9:06:37 AM	SiCl4 MFC set to  0.000000
1/31/2012	9:06:37 AM	Tube furnace set to 0
1/31/2012	9:06:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/31/2012	9:06:41 AM	Bypass valve opened
1/31/2012	9:06:42 AM	Bypass valve closed
1/31/2012	9:06:44 AM	Bypass valve opened
1/31/2012	9:06:46 AM	Bypass valve closed
1/31/2012	9:07:18 AM	Helium MFC set to  200.000000
1/31/2012	9:07:19 AM	Helium valve opened
1/31/2012	9:07:22 AM	Helium valve closed
1/31/2012	9:07:24 AM	Helium valve opened
1/31/2012	9:07:30 AM	Helium MFC set to  500.000000
1/31/2012	9:07:34 AM	Helium valve closed
1/31/2012	9:07:35 AM	Bypass valve opened
1/31/2012	9:07:52 AM	Bypass valve closed
1/31/2012	9:07:53 AM	Helium valve opened
1/31/2012	9:07:54 AM	Helium valve closed
1/31/2012	9:07:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/31/2012	9:07:57 AM	Recipe started at 9:07 AM
1/31/2012	9:07:57 AM	Helium valve closed
1/31/2012	9:07:57 AM	H2 valve closed
1/31/2012	9:07:57 AM	BCl3 valve closed
1/31/2012	9:07:57 AM	PH3 valve closed
1/31/2012	9:07:57 AM	SiCl4 pre valve closed
1/31/2012	9:07:57 AM	SiCl4 post valve closed
1/31/2012	9:07:57 AM	Main Vac valve closed
1/31/2012	9:07:57 AM	Bypass valve closed
1/31/2012	9:07:57 AM	Bubbler valve closed
1/31/2012	9:07:57 AM	Helium MFC set to  0.000000
1/31/2012	9:07:57 AM	H2 MFC set to  0.000000
1/31/2012	9:07:57 AM	BCl3 MFC set to  0.000000
1/31/2012	9:07:57 AM	PH3 MFC set to  0.000000
1/31/2012	9:07:57 AM	SiCl4 MFC set to  0.000000
1/31/2012	9:07:57 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	9:07:57 AM	Tube furnace set to 0
1/31/2012	9:08:00 AM	H2 valve closed
1/31/2012	9:08:00 AM	BCl3 valve closed
1/31/2012	9:08:00 AM	PH3 valve closed
1/31/2012	9:08:00 AM	SiCl4 pre valve closed
1/31/2012	9:08:00 AM	SiCl4 post valve closed
1/31/2012	9:08:00 AM	Main Vac valve closed
1/31/2012	9:08:00 AM	Bypass valve closed
1/31/2012	9:08:00 AM	Bubbler valve closed
1/31/2012	9:08:00 AM	Helium valve opened
1/31/2012	9:08:00 AM	Helium MFC set to  500.000000
1/31/2012	9:08:00 AM	H2 MFC set to  0.000000
1/31/2012	9:08:00 AM	BCl3 MFC set to  0.000000
1/31/2012	9:08:00 AM	PH3 MFC set to  0.000000
1/31/2012	9:08:00 AM	SiCl4 MFC set to  0.000000
1/31/2012	9:08:00 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	9:08:00 AM	Tube furnace set to 0
1/31/2012	9:09:00 AM	Helium valve closed
1/31/2012	9:09:00 AM	H2 valve closed
1/31/2012	9:09:00 AM	BCl3 valve closed
1/31/2012	9:09:00 AM	PH3 valve closed
1/31/2012	9:09:00 AM	SiCl4 pre valve closed
1/31/2012	9:09:00 AM	SiCl4 post valve closed
1/31/2012	9:09:00 AM	Main Vac valve closed
1/31/2012	9:09:00 AM	Bypass valve closed
1/31/2012	9:09:00 AM	Bubbler valve closed
1/31/2012	9:09:00 AM	Helium MFC set to  0.000000
1/31/2012	9:09:00 AM	H2 MFC set to  0.000000
1/31/2012	9:09:00 AM	BCl3 MFC set to  0.000000
1/31/2012	9:09:00 AM	PH3 MFC set to  0.000000
1/31/2012	9:09:00 AM	SiCl4 MFC set to  0.000000
1/31/2012	9:09:00 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	9:09:00 AM	Tube furnace set to 0
1/31/2012	9:09:01 AM	Run finished at 9:09 AM
1/31/2012	9:09:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/31/2012	9:12:16 AM	Bypass valve opened
1/31/2012	9:12:55 AM	Bypass valve closed
1/31/2012	9:13:09 AM	Bypass valve opened
1/31/2012	9:26:51 AM	Bypass valve closed
1/31/2012	9:26:57 AM	Bypass valve opened
1/31/2012	9:27:36 AM	Bypass valve closed
1/31/2012	9:31:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/31/2012	9:31:52 AM	Recipe started at 9:31 AM
1/31/2012	9:31:52 AM	Helium valve closed
1/31/2012	9:31:52 AM	H2 valve closed
1/31/2012	9:31:52 AM	BCl3 valve closed
1/31/2012	9:31:52 AM	PH3 valve closed
1/31/2012	9:31:52 AM	SiCl4 pre valve closed
1/31/2012	9:31:52 AM	SiCl4 post valve closed
1/31/2012	9:31:52 AM	Main Vac valve closed
1/31/2012	9:31:52 AM	Bubbler valve closed
1/31/2012	9:31:52 AM	Bypass valve opened
1/31/2012	9:31:52 AM	Helium MFC set to  0.000000
1/31/2012	9:31:52 AM	H2 MFC set to  0.000000
1/31/2012	9:31:52 AM	BCl3 MFC set to  0.000000
1/31/2012	9:31:52 AM	PH3 MFC set to  0.000000
1/31/2012	9:31:52 AM	SiCl4 MFC set to  0.000000
1/31/2012	9:31:52 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	9:31:52 AM	Tube furnace set to 0
1/31/2012	9:33:03 AM	Helium valve closed
1/31/2012	9:33:03 AM	H2 valve closed
1/31/2012	9:33:03 AM	BCl3 valve closed
1/31/2012	9:33:03 AM	PH3 valve closed
1/31/2012	9:33:03 AM	SiCl4 pre valve closed
1/31/2012	9:33:03 AM	SiCl4 post valve closed
1/31/2012	9:33:03 AM	Main Vac valve closed
1/31/2012	9:33:03 AM	Bubbler valve closed
1/31/2012	9:33:03 AM	Bypass valve opened
1/31/2012	9:33:03 AM	Helium MFC set to  0.000000
1/31/2012	9:33:03 AM	H2 MFC set to  0.000000
1/31/2012	9:33:03 AM	BCl3 MFC set to  0.000000
1/31/2012	9:33:03 AM	PH3 MFC set to  0.000000
1/31/2012	9:33:03 AM	SiCl4 MFC set to  0.000000
1/31/2012	9:33:03 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	9:33:03 AM	Tube furnace set to 0
1/31/2012	9:33:34 AM	Helium valve closed
1/31/2012	9:33:34 AM	H2 valve closed
1/31/2012	9:33:34 AM	BCl3 valve closed
1/31/2012	9:33:34 AM	PH3 valve closed
1/31/2012	9:33:34 AM	SiCl4 pre valve closed
1/31/2012	9:33:34 AM	SiCl4 post valve closed
1/31/2012	9:33:34 AM	Bypass valve closed
1/31/2012	9:33:34 AM	Bubbler valve closed
1/31/2012	9:33:34 AM	Main Vac valve opened
1/31/2012	9:33:34 AM	Helium MFC set to  0.000000
1/31/2012	9:33:34 AM	H2 MFC set to  0.000000
1/31/2012	9:33:34 AM	BCl3 MFC set to  0.000000
1/31/2012	9:33:34 AM	PH3 MFC set to  0.000000
1/31/2012	9:33:34 AM	SiCl4 MFC set to  0.000000
1/31/2012	9:33:34 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	9:33:34 AM	Tube furnace set to 0
1/31/2012	9:33:35 AM	Run finished at 9:33 AM
1/31/2012	9:33:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/31/2012	10:49:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/31/2012	10:49:52 AM	Recipe started at 10:49 AM
1/31/2012	10:49:52 AM	Helium valve closed
1/31/2012	10:49:52 AM	H2 valve closed
1/31/2012	10:49:52 AM	BCl3 valve closed
1/31/2012	10:49:52 AM	PH3 valve closed
1/31/2012	10:49:52 AM	SiCl4 pre valve closed
1/31/2012	10:49:52 AM	SiCl4 post valve closed
1/31/2012	10:49:52 AM	Main Vac valve closed
1/31/2012	10:49:52 AM	Bubbler valve closed
1/31/2012	10:49:52 AM	Bypass valve opened
1/31/2012	10:49:52 AM	Helium MFC set to  0.000000
1/31/2012	10:49:52 AM	H2 MFC set to  0.000000
1/31/2012	10:49:52 AM	BCl3 MFC set to  0.000000
1/31/2012	10:49:53 AM	PH3 MFC set to  0.000000
1/31/2012	10:49:53 AM	SiCl4 MFC set to  0.000000
1/31/2012	10:49:53 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	10:49:53 AM	Tube furnace set to 0
1/31/2012	10:49:53 AM	Helium valve closed
1/31/2012	10:49:53 AM	H2 valve closed
1/31/2012	10:49:53 AM	BCl3 valve closed
1/31/2012	10:49:53 AM	PH3 valve closed
1/31/2012	10:49:53 AM	SiCl4 pre valve closed
1/31/2012	10:49:53 AM	SiCl4 post valve closed
1/31/2012	10:49:53 AM	Main Vac valve closed
1/31/2012	10:49:53 AM	Bubbler valve closed
1/31/2012	10:49:53 AM	Bypass valve opened
1/31/2012	10:49:53 AM	Helium MFC set to  0.000000
1/31/2012	10:49:53 AM	H2 MFC set to  0.000000
1/31/2012	10:49:53 AM	BCl3 MFC set to  0.000000
1/31/2012	10:49:53 AM	PH3 MFC set to  0.000000
1/31/2012	10:49:53 AM	SiCl4 MFC set to  0.000000
1/31/2012	10:49:53 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	10:49:53 AM	Tube furnace set to 0
1/31/2012	10:50:12 AM	Helium valve closed
1/31/2012	10:50:12 AM	H2 valve closed
1/31/2012	10:50:12 AM	BCl3 valve closed
1/31/2012	10:50:12 AM	PH3 valve closed
1/31/2012	10:50:12 AM	SiCl4 pre valve closed
1/31/2012	10:50:12 AM	SiCl4 post valve closed
1/31/2012	10:50:12 AM	Bypass valve closed
1/31/2012	10:50:12 AM	Bubbler valve closed
1/31/2012	10:50:12 AM	Main Vac valve opened
1/31/2012	10:50:12 AM	Helium MFC set to  0.000000
1/31/2012	10:50:12 AM	H2 MFC set to  0.000000
1/31/2012	10:50:12 AM	BCl3 MFC set to  0.000000
1/31/2012	10:50:12 AM	PH3 MFC set to  0.000000
1/31/2012	10:50:12 AM	SiCl4 MFC set to  0.000000
1/31/2012	10:50:12 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	10:50:12 AM	Tube furnace set to 0
1/31/2012	10:50:42 AM	H2 valve closed
1/31/2012	10:50:42 AM	BCl3 valve closed
1/31/2012	10:50:42 AM	PH3 valve closed
1/31/2012	10:50:42 AM	SiCl4 pre valve closed
1/31/2012	10:50:42 AM	SiCl4 post valve closed
1/31/2012	10:50:42 AM	Bypass valve closed
1/31/2012	10:50:42 AM	Bubbler valve closed
1/31/2012	10:50:42 AM	Helium valve opened
1/31/2012	10:50:42 AM	Main Vac valve opened
1/31/2012	10:50:42 AM	Helium MFC set to  20.000000
1/31/2012	10:50:42 AM	H2 MFC set to  0.000000
1/31/2012	10:50:42 AM	BCl3 MFC set to  0.000000
1/31/2012	10:50:42 AM	PH3 MFC set to  0.000000
1/31/2012	10:50:42 AM	SiCl4 MFC set to  0.000000
1/31/2012	10:50:42 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	10:50:42 AM	Tube furnace set to 0
1/31/2012	10:51:12 AM	Helium valve closed
1/31/2012	10:51:12 AM	H2 valve closed
1/31/2012	10:51:12 AM	BCl3 valve closed
1/31/2012	10:51:12 AM	PH3 valve closed
1/31/2012	10:51:12 AM	SiCl4 pre valve closed
1/31/2012	10:51:12 AM	SiCl4 post valve closed
1/31/2012	10:51:12 AM	Bypass valve closed
1/31/2012	10:51:12 AM	Bubbler valve closed
1/31/2012	10:51:12 AM	Main Vac valve opened
1/31/2012	10:51:12 AM	Helium MFC set to  0.000000
1/31/2012	10:51:12 AM	H2 MFC set to  0.000000
1/31/2012	10:51:12 AM	BCl3 MFC set to  0.000000
1/31/2012	10:51:12 AM	PH3 MFC set to  0.000000
1/31/2012	10:51:12 AM	SiCl4 MFC set to  0.000000
1/31/2012	10:51:12 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	10:51:12 AM	Tube furnace set to 0
1/31/2012	10:51:42 AM	H2 valve closed
1/31/2012	10:51:42 AM	BCl3 valve closed
1/31/2012	10:51:42 AM	PH3 valve closed
1/31/2012	10:51:42 AM	SiCl4 pre valve closed
1/31/2012	10:51:42 AM	SiCl4 post valve closed
1/31/2012	10:51:42 AM	Bypass valve closed
1/31/2012	10:51:42 AM	Bubbler valve closed
1/31/2012	10:51:42 AM	Helium valve opened
1/31/2012	10:51:42 AM	Main Vac valve opened
1/31/2012	10:51:42 AM	Helium MFC set to  20.000000
1/31/2012	10:51:42 AM	H2 MFC set to  0.000000
1/31/2012	10:51:42 AM	BCl3 MFC set to  0.000000
1/31/2012	10:51:42 AM	PH3 MFC set to  0.000000
1/31/2012	10:51:42 AM	SiCl4 MFC set to  0.000000
1/31/2012	10:51:42 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	10:51:42 AM	Tube furnace set to 0
1/31/2012	10:52:12 AM	Helium valve closed
1/31/2012	10:52:12 AM	H2 valve closed
1/31/2012	10:52:12 AM	BCl3 valve closed
1/31/2012	10:52:12 AM	PH3 valve closed
1/31/2012	10:52:12 AM	SiCl4 pre valve closed
1/31/2012	10:52:12 AM	SiCl4 post valve closed
1/31/2012	10:52:12 AM	Bypass valve closed
1/31/2012	10:52:12 AM	Bubbler valve closed
1/31/2012	10:52:12 AM	Main Vac valve opened
1/31/2012	10:52:12 AM	Helium MFC set to  0.000000
1/31/2012	10:52:12 AM	H2 MFC set to  0.000000
1/31/2012	10:52:12 AM	BCl3 MFC set to  0.000000
1/31/2012	10:52:12 AM	PH3 MFC set to  0.000000
1/31/2012	10:52:12 AM	SiCl4 MFC set to  0.000000
1/31/2012	10:52:12 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	10:52:13 AM	Tube furnace set to 0
1/31/2012	10:52:43 AM	H2 valve closed
1/31/2012	10:52:43 AM	BCl3 valve closed
1/31/2012	10:52:43 AM	PH3 valve closed
1/31/2012	10:52:43 AM	SiCl4 pre valve closed
1/31/2012	10:52:43 AM	SiCl4 post valve closed
1/31/2012	10:52:43 AM	Bypass valve closed
1/31/2012	10:52:43 AM	Bubbler valve closed
1/31/2012	10:52:43 AM	Helium valve opened
1/31/2012	10:52:43 AM	Main Vac valve opened
1/31/2012	10:52:43 AM	Helium MFC set to  20.000000
1/31/2012	10:52:43 AM	H2 MFC set to  0.000000
1/31/2012	10:52:43 AM	BCl3 MFC set to  0.000000
1/31/2012	10:52:43 AM	PH3 MFC set to  0.000000
1/31/2012	10:52:43 AM	SiCl4 MFC set to  0.000000
1/31/2012	10:52:43 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	10:52:43 AM	Tube furnace set to 0
1/31/2012	10:53:13 AM	Helium valve closed
1/31/2012	10:53:13 AM	H2 valve closed
1/31/2012	10:53:13 AM	BCl3 valve closed
1/31/2012	10:53:13 AM	PH3 valve closed
1/31/2012	10:53:13 AM	SiCl4 pre valve closed
1/31/2012	10:53:13 AM	SiCl4 post valve closed
1/31/2012	10:53:13 AM	Bypass valve closed
1/31/2012	10:53:13 AM	Bubbler valve closed
1/31/2012	10:53:13 AM	Main Vac valve opened
1/31/2012	10:53:13 AM	Helium MFC set to  0.000000
1/31/2012	10:53:13 AM	H2 MFC set to  0.000000
1/31/2012	10:53:13 AM	BCl3 MFC set to  0.000000
1/31/2012	10:53:13 AM	PH3 MFC set to  0.000000
1/31/2012	10:53:13 AM	SiCl4 MFC set to  0.000000
1/31/2012	10:53:13 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	10:53:13 AM	Tube furnace set to 0
1/31/2012	10:53:43 AM	H2 valve closed
1/31/2012	10:53:43 AM	BCl3 valve closed
1/31/2012	10:53:43 AM	PH3 valve closed
1/31/2012	10:53:43 AM	SiCl4 pre valve closed
1/31/2012	10:53:43 AM	SiCl4 post valve closed
1/31/2012	10:53:43 AM	Bypass valve closed
1/31/2012	10:53:43 AM	Bubbler valve closed
1/31/2012	10:53:43 AM	Helium valve opened
1/31/2012	10:53:43 AM	Main Vac valve opened
1/31/2012	10:53:43 AM	Helium MFC set to  20.000000
1/31/2012	10:53:43 AM	H2 MFC set to  0.000000
1/31/2012	10:53:43 AM	BCl3 MFC set to  0.000000
1/31/2012	10:53:43 AM	PH3 MFC set to  0.000000
1/31/2012	10:53:43 AM	SiCl4 MFC set to  0.000000
1/31/2012	10:53:43 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	10:53:43 AM	Tube furnace set to 0
1/31/2012	10:54:13 AM	Helium valve closed
1/31/2012	10:54:13 AM	H2 valve closed
1/31/2012	10:54:13 AM	BCl3 valve closed
1/31/2012	10:54:13 AM	PH3 valve closed
1/31/2012	10:54:13 AM	SiCl4 pre valve closed
1/31/2012	10:54:13 AM	SiCl4 post valve closed
1/31/2012	10:54:13 AM	Bypass valve closed
1/31/2012	10:54:13 AM	Bubbler valve closed
1/31/2012	10:54:13 AM	Main Vac valve opened
1/31/2012	10:54:13 AM	Helium MFC set to  0.000000
1/31/2012	10:54:13 AM	H2 MFC set to  0.000000
1/31/2012	10:54:13 AM	BCl3 MFC set to  0.000000
1/31/2012	10:54:13 AM	PH3 MFC set to  0.000000
1/31/2012	10:54:13 AM	SiCl4 MFC set to  0.000000
1/31/2012	10:54:13 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	10:54:13 AM	Tube furnace set to 0
1/31/2012	10:54:43 AM	H2 valve closed
1/31/2012	10:54:43 AM	BCl3 valve closed
1/31/2012	10:54:43 AM	PH3 valve closed
1/31/2012	10:54:43 AM	SiCl4 pre valve closed
1/31/2012	10:54:43 AM	SiCl4 post valve closed
1/31/2012	10:54:43 AM	Bypass valve closed
1/31/2012	10:54:43 AM	Bubbler valve closed
1/31/2012	10:54:43 AM	Helium valve opened
1/31/2012	10:54:43 AM	Main Vac valve opened
1/31/2012	10:54:43 AM	Helium MFC set to  20.000000
1/31/2012	10:54:43 AM	H2 MFC set to  0.000000
1/31/2012	10:54:43 AM	BCl3 MFC set to  0.000000
1/31/2012	10:54:43 AM	PH3 MFC set to  0.000000
1/31/2012	10:54:43 AM	SiCl4 MFC set to  0.000000
1/31/2012	10:54:43 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	10:54:44 AM	Tube furnace set to 0
1/31/2012	10:55:14 AM	Helium valve closed
1/31/2012	10:55:14 AM	H2 valve closed
1/31/2012	10:55:14 AM	BCl3 valve closed
1/31/2012	10:55:14 AM	PH3 valve closed
1/31/2012	10:55:14 AM	SiCl4 pre valve closed
1/31/2012	10:55:14 AM	SiCl4 post valve closed
1/31/2012	10:55:14 AM	Bypass valve closed
1/31/2012	10:55:14 AM	Bubbler valve closed
1/31/2012	10:55:14 AM	Main Vac valve opened
1/31/2012	10:55:14 AM	Helium MFC set to  0.000000
1/31/2012	10:55:14 AM	H2 MFC set to  0.000000
1/31/2012	10:55:14 AM	BCl3 MFC set to  0.000000
1/31/2012	10:55:14 AM	PH3 MFC set to  0.000000
1/31/2012	10:55:14 AM	SiCl4 MFC set to  0.000000
1/31/2012	10:55:14 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	10:55:14 AM	Tube furnace set to 0
1/31/2012	10:55:44 AM	H2 valve closed
1/31/2012	10:55:44 AM	BCl3 valve closed
1/31/2012	10:55:44 AM	PH3 valve closed
1/31/2012	10:55:44 AM	SiCl4 pre valve closed
1/31/2012	10:55:44 AM	SiCl4 post valve closed
1/31/2012	10:55:44 AM	Bypass valve closed
1/31/2012	10:55:44 AM	Bubbler valve closed
1/31/2012	10:55:44 AM	Helium valve opened
1/31/2012	10:55:44 AM	Main Vac valve opened
1/31/2012	10:55:44 AM	Helium MFC set to  20.000000
1/31/2012	10:55:44 AM	H2 MFC set to  0.000000
1/31/2012	10:55:44 AM	BCl3 MFC set to  0.000000
1/31/2012	10:55:44 AM	PH3 MFC set to  0.000000
1/31/2012	10:55:44 AM	SiCl4 MFC set to  0.000000
1/31/2012	10:55:44 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	10:55:44 AM	Tube furnace set to 0
1/31/2012	10:56:14 AM	Helium valve closed
1/31/2012	10:56:14 AM	H2 valve closed
1/31/2012	10:56:14 AM	BCl3 valve closed
1/31/2012	10:56:14 AM	PH3 valve closed
1/31/2012	10:56:14 AM	SiCl4 pre valve closed
1/31/2012	10:56:14 AM	SiCl4 post valve closed
1/31/2012	10:56:14 AM	Bypass valve closed
1/31/2012	10:56:14 AM	Bubbler valve closed
1/31/2012	10:56:14 AM	Main Vac valve opened
1/31/2012	10:56:14 AM	Helium MFC set to  0.000000
1/31/2012	10:56:14 AM	H2 MFC set to  0.000000
1/31/2012	10:56:14 AM	BCl3 MFC set to  0.000000
1/31/2012	10:56:14 AM	PH3 MFC set to  0.000000
1/31/2012	10:56:14 AM	SiCl4 MFC set to  0.000000
1/31/2012	10:56:14 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	10:56:14 AM	Tube furnace set to 0
1/31/2012	10:56:44 AM	H2 valve closed
1/31/2012	10:56:44 AM	BCl3 valve closed
1/31/2012	10:56:44 AM	PH3 valve closed
1/31/2012	10:56:44 AM	SiCl4 pre valve closed
1/31/2012	10:56:44 AM	SiCl4 post valve closed
1/31/2012	10:56:44 AM	Bypass valve closed
1/31/2012	10:56:44 AM	Bubbler valve closed
1/31/2012	10:56:44 AM	Helium valve opened
1/31/2012	10:56:44 AM	Main Vac valve opened
1/31/2012	10:56:44 AM	Helium MFC set to  20.000000
1/31/2012	10:56:44 AM	H2 MFC set to  0.000000
1/31/2012	10:56:44 AM	BCl3 MFC set to  0.000000
1/31/2012	10:56:44 AM	PH3 MFC set to  0.000000
1/31/2012	10:56:44 AM	SiCl4 MFC set to  0.000000
1/31/2012	10:56:44 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	10:56:44 AM	Tube furnace set to 0
1/31/2012	10:57:15 AM	Helium valve closed
1/31/2012	10:57:15 AM	H2 valve closed
1/31/2012	10:57:15 AM	BCl3 valve closed
1/31/2012	10:57:15 AM	PH3 valve closed
1/31/2012	10:57:15 AM	SiCl4 pre valve closed
1/31/2012	10:57:15 AM	SiCl4 post valve closed
1/31/2012	10:57:15 AM	Bypass valve closed
1/31/2012	10:57:15 AM	Bubbler valve closed
1/31/2012	10:57:15 AM	Main Vac valve opened
1/31/2012	10:57:15 AM	Helium MFC set to  0.000000
1/31/2012	10:57:15 AM	H2 MFC set to  0.000000
1/31/2012	10:57:15 AM	BCl3 MFC set to  0.000000
1/31/2012	10:57:15 AM	PH3 MFC set to  0.000000
1/31/2012	10:57:15 AM	SiCl4 MFC set to  0.000000
1/31/2012	10:57:15 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	10:57:15 AM	Tube furnace set to 0
1/31/2012	10:57:45 AM	H2 valve closed
1/31/2012	10:57:45 AM	BCl3 valve closed
1/31/2012	10:57:45 AM	PH3 valve closed
1/31/2012	10:57:45 AM	SiCl4 pre valve closed
1/31/2012	10:57:45 AM	SiCl4 post valve closed
1/31/2012	10:57:45 AM	Bypass valve closed
1/31/2012	10:57:45 AM	Bubbler valve closed
1/31/2012	10:57:45 AM	Helium valve opened
1/31/2012	10:57:45 AM	Main Vac valve opened
1/31/2012	10:57:45 AM	Helium MFC set to  20.000000
1/31/2012	10:57:45 AM	H2 MFC set to  0.000000
1/31/2012	10:57:45 AM	BCl3 MFC set to  0.000000
1/31/2012	10:57:45 AM	PH3 MFC set to  0.000000
1/31/2012	10:57:45 AM	SiCl4 MFC set to  0.000000
1/31/2012	10:57:45 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	10:57:45 AM	Tube furnace set to 0
1/31/2012	10:58:15 AM	Helium valve closed
1/31/2012	10:58:15 AM	H2 valve closed
1/31/2012	10:58:15 AM	BCl3 valve closed
1/31/2012	10:58:15 AM	PH3 valve closed
1/31/2012	10:58:15 AM	SiCl4 pre valve closed
1/31/2012	10:58:15 AM	SiCl4 post valve closed
1/31/2012	10:58:15 AM	Bypass valve closed
1/31/2012	10:58:15 AM	Bubbler valve closed
1/31/2012	10:58:15 AM	Main Vac valve opened
1/31/2012	10:58:15 AM	Helium MFC set to  0.000000
1/31/2012	10:58:15 AM	H2 MFC set to  0.000000
1/31/2012	10:58:15 AM	BCl3 MFC set to  0.000000
1/31/2012	10:58:15 AM	PH3 MFC set to  0.000000
1/31/2012	10:58:15 AM	SiCl4 MFC set to  0.000000
1/31/2012	10:58:15 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	10:58:15 AM	Tube furnace set to 0
1/31/2012	10:58:45 AM	H2 valve closed
1/31/2012	10:58:45 AM	BCl3 valve closed
1/31/2012	10:58:45 AM	PH3 valve closed
1/31/2012	10:58:45 AM	SiCl4 pre valve closed
1/31/2012	10:58:45 AM	SiCl4 post valve closed
1/31/2012	10:58:45 AM	Bypass valve closed
1/31/2012	10:58:45 AM	Bubbler valve closed
1/31/2012	10:58:45 AM	Helium valve opened
1/31/2012	10:58:45 AM	Main Vac valve opened
1/31/2012	10:58:45 AM	Helium MFC set to  20.000000
1/31/2012	10:58:45 AM	H2 MFC set to  0.000000
1/31/2012	10:58:45 AM	BCl3 MFC set to  0.000000
1/31/2012	10:58:45 AM	PH3 MFC set to  0.000000
1/31/2012	10:58:45 AM	SiCl4 MFC set to  0.000000
1/31/2012	10:58:45 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	10:58:45 AM	Tube furnace set to 0
1/31/2012	10:59:15 AM	Helium valve closed
1/31/2012	10:59:15 AM	H2 valve closed
1/31/2012	10:59:15 AM	BCl3 valve closed
1/31/2012	10:59:15 AM	PH3 valve closed
1/31/2012	10:59:15 AM	SiCl4 pre valve closed
1/31/2012	10:59:15 AM	SiCl4 post valve closed
1/31/2012	10:59:15 AM	Bypass valve closed
1/31/2012	10:59:15 AM	Bubbler valve closed
1/31/2012	10:59:15 AM	Main Vac valve opened
1/31/2012	10:59:15 AM	Helium MFC set to  0.000000
1/31/2012	10:59:15 AM	H2 MFC set to  0.000000
1/31/2012	10:59:15 AM	BCl3 MFC set to  0.000000
1/31/2012	10:59:15 AM	PH3 MFC set to  0.000000
1/31/2012	10:59:15 AM	SiCl4 MFC set to  0.000000
1/31/2012	10:59:15 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	10:59:16 AM	Tube furnace set to 0
1/31/2012	10:59:46 AM	H2 valve closed
1/31/2012	10:59:46 AM	BCl3 valve closed
1/31/2012	10:59:46 AM	PH3 valve closed
1/31/2012	10:59:46 AM	SiCl4 pre valve closed
1/31/2012	10:59:46 AM	SiCl4 post valve closed
1/31/2012	10:59:46 AM	Bypass valve closed
1/31/2012	10:59:46 AM	Bubbler valve closed
1/31/2012	10:59:46 AM	Helium valve opened
1/31/2012	10:59:46 AM	Main Vac valve opened
1/31/2012	10:59:46 AM	Helium MFC set to  20.000000
1/31/2012	10:59:46 AM	H2 MFC set to  0.000000
1/31/2012	10:59:46 AM	BCl3 MFC set to  0.000000
1/31/2012	10:59:46 AM	PH3 MFC set to  0.000000
1/31/2012	10:59:46 AM	SiCl4 MFC set to  0.000000
1/31/2012	10:59:46 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	10:59:46 AM	Tube furnace set to 0
1/31/2012	11:00:16 AM	Helium valve closed
1/31/2012	11:00:16 AM	H2 valve closed
1/31/2012	11:00:16 AM	BCl3 valve closed
1/31/2012	11:00:16 AM	PH3 valve closed
1/31/2012	11:00:16 AM	SiCl4 pre valve closed
1/31/2012	11:00:16 AM	SiCl4 post valve closed
1/31/2012	11:00:16 AM	Bypass valve closed
1/31/2012	11:00:16 AM	Bubbler valve closed
1/31/2012	11:00:16 AM	Main Vac valve opened
1/31/2012	11:00:16 AM	Helium MFC set to  0.000000
1/31/2012	11:00:16 AM	H2 MFC set to  0.000000
1/31/2012	11:00:16 AM	BCl3 MFC set to  0.000000
1/31/2012	11:00:16 AM	PH3 MFC set to  0.000000
1/31/2012	11:00:16 AM	SiCl4 MFC set to  0.000000
1/31/2012	11:00:16 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	11:00:16 AM	Tube furnace set to 0
1/31/2012	11:00:17 AM	Run finished at 11:00 AM
1/31/2012	11:00:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/31/2012	11:02:08 AM	Main Vac valve closed
1/31/2012	11:02:40 AM	Main Vac valve opened
1/31/2012	11:03:57 AM	Main Vac valve closed
1/31/2012	11:04:20 AM	Main Vac valve opened
1/31/2012	11:06:24 AM	Recipe started at 11:06 AM
1/31/2012	11:06:25 AM	Helium valve closed
1/31/2012	11:06:25 AM	H2 valve closed
1/31/2012	11:06:25 AM	BCl3 valve closed
1/31/2012	11:06:25 AM	PH3 valve closed
1/31/2012	11:06:25 AM	SiCl4 pre valve closed
1/31/2012	11:06:25 AM	SiCl4 post valve closed
1/31/2012	11:06:25 AM	Main Vac valve closed
1/31/2012	11:06:25 AM	Bypass valve closed
1/31/2012	11:06:25 AM	Bubbler valve closed
1/31/2012	11:06:25 AM	Helium MFC set to  0.000000
1/31/2012	11:06:25 AM	H2 MFC set to  0.000000
1/31/2012	11:06:25 AM	BCl3 MFC set to  0.000000
1/31/2012	11:06:25 AM	PH3 MFC set to  0.000000
1/31/2012	11:06:25 AM	SiCl4 MFC set to  0.000000
1/31/2012	11:06:25 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	11:06:25 AM	Tube furnace set to 0
1/31/2012	11:06:28 AM	Helium valve closed
1/31/2012	11:06:28 AM	BCl3 valve closed
1/31/2012	11:06:28 AM	PH3 valve closed
1/31/2012	11:06:28 AM	SiCl4 pre valve closed
1/31/2012	11:06:28 AM	SiCl4 post valve closed
1/31/2012	11:06:28 AM	Main Vac valve closed
1/31/2012	11:06:28 AM	Bypass valve closed
1/31/2012	11:06:28 AM	Bubbler valve closed
1/31/2012	11:06:28 AM	H2 valve opened
1/31/2012	11:06:28 AM	Helium MFC set to  0.000000
1/31/2012	11:06:28 AM	H2 MFC set to  500.000000
1/31/2012	11:06:28 AM	BCl3 MFC set to  0.000000
1/31/2012	11:06:28 AM	PH3 MFC set to  0.000000
1/31/2012	11:06:28 AM	SiCl4 MFC set to  0.000000
1/31/2012	11:06:28 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	11:06:28 AM	Tube furnace set to 0
1/31/2012	11:07:36 AM	Helium valve closed
1/31/2012	11:07:36 AM	BCl3 valve closed
1/31/2012	11:07:36 AM	PH3 valve closed
1/31/2012	11:07:36 AM	SiCl4 pre valve closed
1/31/2012	11:07:36 AM	SiCl4 post valve closed
1/31/2012	11:07:36 AM	Main Vac valve closed
1/31/2012	11:07:36 AM	Bypass valve closed
1/31/2012	11:07:36 AM	H2 valve opened
1/31/2012	11:07:36 AM	Bubbler valve opened
1/31/2012	11:07:36 AM	Helium MFC set to  0.000000
1/31/2012	11:07:36 AM	H2 MFC set to  500.000000
1/31/2012	11:07:36 AM	BCl3 MFC set to  0.000000
1/31/2012	11:07:36 AM	PH3 MFC set to  0.000000
1/31/2012	11:07:36 AM	SiCl4 MFC set to  0.000000
1/31/2012	11:07:36 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	11:07:37 AM	Tube furnace set to 0
1/31/2012	11:07:38 AM	Helium valve closed
1/31/2012	11:07:38 AM	BCl3 valve closed
1/31/2012	11:07:38 AM	PH3 valve closed
1/31/2012	11:07:38 AM	SiCl4 pre valve closed
1/31/2012	11:07:38 AM	SiCl4 post valve closed
1/31/2012	11:07:38 AM	Main Vac valve closed
1/31/2012	11:07:38 AM	Bypass valve closed
1/31/2012	11:07:38 AM	H2 valve opened
1/31/2012	11:07:38 AM	Bubbler valve opened
1/31/2012	11:07:38 AM	Helium MFC set to  0.000000
1/31/2012	11:07:38 AM	H2 MFC set to  500.000000
1/31/2012	11:07:38 AM	BCl3 MFC set to  0.000000
1/31/2012	11:07:38 AM	PH3 MFC set to  0.000000
1/31/2012	11:07:38 AM	SiCl4 MFC set to  0.000000
1/31/2012	11:07:38 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	11:07:38 AM	Tube furnace set to 1000
1/31/2012	11:27:38 AM	Helium valve closed
1/31/2012	11:27:38 AM	PH3 valve closed
1/31/2012	11:27:38 AM	Main Vac valve closed
1/31/2012	11:27:38 AM	Bypass valve closed
1/31/2012	11:27:38 AM	H2 valve opened
1/31/2012	11:27:38 AM	BCl3 valve opened
1/31/2012	11:27:38 AM	SiCl4 pre valve opened
1/31/2012	11:27:38 AM	SiCl4 post valve opened
1/31/2012	11:27:38 AM	Bubbler valve opened
1/31/2012	11:27:38 AM	Helium MFC set to  0.000000
1/31/2012	11:27:38 AM	H2 MFC set to  500.000000
1/31/2012	11:27:38 AM	BCl3 MFC set to  1.000000
1/31/2012	11:27:38 AM	PH3 MFC set to  0.000000
1/31/2012	11:27:38 AM	SiCl4 MFC set to  50.000000
1/31/2012	11:27:38 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	11:27:38 AM	Tube furnace set to 1000
1/31/2012	11:47:38 AM	Helium valve closed
1/31/2012	11:47:38 AM	BCl3 valve closed
1/31/2012	11:47:38 AM	PH3 valve closed
1/31/2012	11:47:38 AM	SiCl4 pre valve closed
1/31/2012	11:47:38 AM	SiCl4 post valve closed
1/31/2012	11:47:38 AM	Main Vac valve closed
1/31/2012	11:47:38 AM	Bypass valve closed
1/31/2012	11:47:38 AM	H2 valve opened
1/31/2012	11:47:38 AM	Bubbler valve opened
1/31/2012	11:47:38 AM	Helium MFC set to  0.000000
1/31/2012	11:47:38 AM	H2 MFC set to  500.000000
1/31/2012	11:47:38 AM	BCl3 MFC set to  0.000000
1/31/2012	11:47:38 AM	PH3 MFC set to  0.000000
1/31/2012	11:47:38 AM	SiCl4 MFC set to  0.000000
1/31/2012	11:47:38 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	11:47:38 AM	Tube furnace set to 750
1/31/2012	11:52:38 AM	H2 valve closed
1/31/2012	11:52:38 AM	BCl3 valve closed
1/31/2012	11:52:38 AM	PH3 valve closed
1/31/2012	11:52:38 AM	SiCl4 pre valve closed
1/31/2012	11:52:38 AM	SiCl4 post valve closed
1/31/2012	11:52:38 AM	Main Vac valve closed
1/31/2012	11:52:38 AM	Bypass valve closed
1/31/2012	11:52:38 AM	Helium valve opened
1/31/2012	11:52:38 AM	Bubbler valve opened
1/31/2012	11:52:38 AM	Helium MFC set to  500.000000
1/31/2012	11:52:38 AM	H2 MFC set to  0.000000
1/31/2012	11:52:38 AM	BCl3 MFC set to  0.000000
1/31/2012	11:52:38 AM	PH3 MFC set to  0.000000
1/31/2012	11:52:38 AM	SiCl4 MFC set to  0.000000
1/31/2012	11:52:38 AM	Bypass solenoid MFC set to  0.000000
1/31/2012	11:52:38 AM	Tube furnace set to 0
1/31/2012	12:12:38 PM	Helium valve closed
1/31/2012	12:12:38 PM	H2 valve closed
1/31/2012	12:12:38 PM	BCl3 valve closed
1/31/2012	12:12:38 PM	PH3 valve closed
1/31/2012	12:12:38 PM	SiCl4 pre valve closed
1/31/2012	12:12:38 PM	SiCl4 post valve closed
1/31/2012	12:12:38 PM	Main Vac valve closed
1/31/2012	12:12:38 PM	Bypass valve closed
1/31/2012	12:12:38 PM	Bubbler valve closed
1/31/2012	12:12:38 PM	Helium MFC set to  0.000000
1/31/2012	12:12:38 PM	H2 MFC set to  0.000000
1/31/2012	12:12:38 PM	BCl3 MFC set to  0.000000
1/31/2012	12:12:38 PM	PH3 MFC set to  0.000000
1/31/2012	12:12:38 PM	SiCl4 MFC set to  0.000000
1/31/2012	12:12:38 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	12:12:39 PM	Tube furnace set to 0
1/31/2012	12:12:40 PM	Run finished at 12:12 PM
1/31/2012	12:12:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/31/2012	12:12:49 PM	Recipe started at 12:12 PM
1/31/2012	12:12:49 PM	Helium valve closed
1/31/2012	12:12:49 PM	H2 valve closed
1/31/2012	12:12:49 PM	BCl3 valve closed
1/31/2012	12:12:49 PM	PH3 valve closed
1/31/2012	12:12:49 PM	SiCl4 pre valve closed
1/31/2012	12:12:49 PM	SiCl4 post valve closed
1/31/2012	12:12:49 PM	Main Vac valve closed
1/31/2012	12:12:49 PM	Bypass valve closed
1/31/2012	12:12:49 PM	Bubbler valve closed
1/31/2012	12:12:49 PM	Helium MFC set to  0.000000
1/31/2012	12:12:49 PM	H2 MFC set to  0.000000
1/31/2012	12:12:49 PM	BCl3 MFC set to  0.000000
1/31/2012	12:12:49 PM	PH3 MFC set to  0.000000
1/31/2012	12:12:49 PM	SiCl4 MFC set to  0.000000
1/31/2012	12:12:49 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	12:12:49 PM	Tube furnace set to 0
1/31/2012	12:12:52 PM	H2 valve closed
1/31/2012	12:12:52 PM	BCl3 valve closed
1/31/2012	12:12:52 PM	PH3 valve closed
1/31/2012	12:12:52 PM	SiCl4 pre valve closed
1/31/2012	12:12:52 PM	SiCl4 post valve closed
1/31/2012	12:12:52 PM	Main Vac valve closed
1/31/2012	12:12:52 PM	Bypass valve closed
1/31/2012	12:12:52 PM	Bubbler valve closed
1/31/2012	12:12:52 PM	Helium valve opened
1/31/2012	12:12:52 PM	Helium MFC set to  500.000000
1/31/2012	12:12:52 PM	H2 MFC set to  0.000000
1/31/2012	12:12:52 PM	BCl3 MFC set to  0.000000
1/31/2012	12:12:52 PM	PH3 MFC set to  0.000000
1/31/2012	12:12:52 PM	SiCl4 MFC set to  0.000000
1/31/2012	12:12:52 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	12:12:53 PM	Tube furnace set to 0
1/31/2012	12:12:53 PM	Helium valve closed
1/31/2012	12:12:53 PM	H2 valve closed
1/31/2012	12:12:53 PM	BCl3 valve closed
1/31/2012	12:12:53 PM	PH3 valve closed
1/31/2012	12:12:53 PM	SiCl4 pre valve closed
1/31/2012	12:12:53 PM	SiCl4 post valve closed
1/31/2012	12:12:53 PM	Main Vac valve closed
1/31/2012	12:12:53 PM	Bypass valve closed
1/31/2012	12:12:53 PM	Bubbler valve closed
1/31/2012	12:12:53 PM	Helium MFC set to  0.000000
1/31/2012	12:12:53 PM	H2 MFC set to  0.000000
1/31/2012	12:12:53 PM	BCl3 MFC set to  0.000000
1/31/2012	12:12:53 PM	PH3 MFC set to  0.000000
1/31/2012	12:12:53 PM	SiCl4 MFC set to  0.000000
1/31/2012	12:12:53 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	12:12:53 PM	Tube furnace set to 0
1/31/2012	12:12:54 PM	Run finished at 12:12 PM
1/31/2012	12:12:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/31/2012	12:21:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/31/2012	12:21:42 PM	Recipe started at 12:21 PM
1/31/2012	12:21:42 PM	Helium valve closed
1/31/2012	12:21:42 PM	H2 valve closed
1/31/2012	12:21:42 PM	BCl3 valve closed
1/31/2012	12:21:42 PM	PH3 valve closed
1/31/2012	12:21:42 PM	SiCl4 pre valve closed
1/31/2012	12:21:42 PM	SiCl4 post valve closed
1/31/2012	12:21:42 PM	Main Vac valve closed
1/31/2012	12:21:42 PM	Bubbler valve closed
1/31/2012	12:21:42 PM	Bypass valve opened
1/31/2012	12:21:42 PM	Helium MFC set to  0.000000
1/31/2012	12:21:42 PM	H2 MFC set to  0.000000
1/31/2012	12:21:42 PM	BCl3 MFC set to  0.000000
1/31/2012	12:21:42 PM	PH3 MFC set to  0.000000
1/31/2012	12:21:42 PM	SiCl4 MFC set to  0.000000
1/31/2012	12:21:42 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	12:21:42 PM	Tube furnace set to 0
1/31/2012	12:21:48 PM	Run aborted at 12:21 PM
1/31/2012	12:21:48 PM	Helium valve closed
1/31/2012	12:21:48 PM	H2 valve closed
1/31/2012	12:21:48 PM	BCl3 valve closed
1/31/2012	12:21:48 PM	PH3 valve closed
1/31/2012	12:21:48 PM	SiCl4 pre valve closed
1/31/2012	12:21:48 PM	SiCl4 post valve closed
1/31/2012	12:21:48 PM	Bypass valve closed
1/31/2012	12:21:48 PM	Main Vac valve closed
1/31/2012	12:21:48 PM	Bubbler valve closed
1/31/2012	12:21:48 PM	Helium MFC set to  0.000000
1/31/2012	12:21:48 PM	H2 MFC set to  0.000000
1/31/2012	12:21:48 PM	BCl3 MFC set to  0.000000
1/31/2012	12:21:48 PM	PH3 MFC set to  0.000000
1/31/2012	12:21:48 PM	SiCl4 MFC set to  0.000000
1/31/2012	12:21:48 PM	Tube furnace set to 0
1/31/2012	12:21:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/31/2012	12:21:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/31/2012	12:21:51 PM	Recipe started at 12:21 PM
1/31/2012	12:21:51 PM	Helium valve closed
1/31/2012	12:21:51 PM	H2 valve closed
1/31/2012	12:21:51 PM	BCl3 valve closed
1/31/2012	12:21:51 PM	PH3 valve closed
1/31/2012	12:21:51 PM	SiCl4 pre valve closed
1/31/2012	12:21:51 PM	SiCl4 post valve closed
1/31/2012	12:21:51 PM	Main Vac valve closed
1/31/2012	12:21:51 PM	Bypass valve closed
1/31/2012	12:21:51 PM	Bubbler valve closed
1/31/2012	12:21:51 PM	Helium MFC set to  0.000000
1/31/2012	12:21:51 PM	H2 MFC set to  0.000000
1/31/2012	12:21:51 PM	BCl3 MFC set to  0.000000
1/31/2012	12:21:51 PM	PH3 MFC set to  0.000000
1/31/2012	12:21:51 PM	SiCl4 MFC set to  0.000000
1/31/2012	12:21:51 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	12:21:51 PM	Tube furnace set to 0
1/31/2012	12:21:54 PM	H2 valve closed
1/31/2012	12:21:54 PM	BCl3 valve closed
1/31/2012	12:21:54 PM	PH3 valve closed
1/31/2012	12:21:54 PM	SiCl4 pre valve closed
1/31/2012	12:21:54 PM	SiCl4 post valve closed
1/31/2012	12:21:54 PM	Main Vac valve closed
1/31/2012	12:21:54 PM	Bypass valve closed
1/31/2012	12:21:54 PM	Bubbler valve closed
1/31/2012	12:21:54 PM	Helium valve opened
1/31/2012	12:21:54 PM	Helium MFC set to  500.000000
1/31/2012	12:21:54 PM	H2 MFC set to  0.000000
1/31/2012	12:21:54 PM	BCl3 MFC set to  0.000000
1/31/2012	12:21:54 PM	PH3 MFC set to  0.000000
1/31/2012	12:21:54 PM	SiCl4 MFC set to  0.000000
1/31/2012	12:21:54 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	12:21:55 PM	Tube furnace set to 0
1/31/2012	12:22:36 PM	Helium valve closed
1/31/2012	12:22:36 PM	H2 valve closed
1/31/2012	12:22:36 PM	BCl3 valve closed
1/31/2012	12:22:36 PM	PH3 valve closed
1/31/2012	12:22:36 PM	SiCl4 pre valve closed
1/31/2012	12:22:36 PM	SiCl4 post valve closed
1/31/2012	12:22:36 PM	Main Vac valve closed
1/31/2012	12:22:36 PM	Bypass valve closed
1/31/2012	12:22:36 PM	Bubbler valve closed
1/31/2012	12:22:36 PM	Helium MFC set to  0.000000
1/31/2012	12:22:36 PM	H2 MFC set to  0.000000
1/31/2012	12:22:36 PM	BCl3 MFC set to  0.000000
1/31/2012	12:22:36 PM	PH3 MFC set to  0.000000
1/31/2012	12:22:36 PM	SiCl4 MFC set to  0.000000
1/31/2012	12:22:36 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	12:22:36 PM	Tube furnace set to 0
1/31/2012	12:22:37 PM	Run finished at 12:22 PM
1/31/2012	12:22:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/31/2012	12:24:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/31/2012	12:24:32 PM	Recipe started at 12:24 PM
1/31/2012	12:24:33 PM	Helium valve closed
1/31/2012	12:24:33 PM	H2 valve closed
1/31/2012	12:24:33 PM	BCl3 valve closed
1/31/2012	12:24:33 PM	PH3 valve closed
1/31/2012	12:24:33 PM	SiCl4 pre valve closed
1/31/2012	12:24:33 PM	SiCl4 post valve closed
1/31/2012	12:24:33 PM	Main Vac valve closed
1/31/2012	12:24:33 PM	Bubbler valve closed
1/31/2012	12:24:33 PM	Bypass valve opened
1/31/2012	12:24:33 PM	Helium MFC set to  0.000000
1/31/2012	12:24:33 PM	H2 MFC set to  0.000000
1/31/2012	12:24:33 PM	BCl3 MFC set to  0.000000
1/31/2012	12:24:33 PM	PH3 MFC set to  0.000000
1/31/2012	12:24:33 PM	SiCl4 MFC set to  0.000000
1/31/2012	12:24:33 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	12:24:33 PM	Tube furnace set to 0
1/31/2012	12:25:33 PM	Helium valve closed
1/31/2012	12:25:33 PM	H2 valve closed
1/31/2012	12:25:33 PM	BCl3 valve closed
1/31/2012	12:25:33 PM	PH3 valve closed
1/31/2012	12:25:33 PM	SiCl4 pre valve closed
1/31/2012	12:25:33 PM	SiCl4 post valve closed
1/31/2012	12:25:33 PM	Main Vac valve closed
1/31/2012	12:25:33 PM	Bubbler valve closed
1/31/2012	12:25:33 PM	Bypass valve opened
1/31/2012	12:25:33 PM	Helium MFC set to  0.000000
1/31/2012	12:25:33 PM	H2 MFC set to  0.000000
1/31/2012	12:25:33 PM	BCl3 MFC set to  0.000000
1/31/2012	12:25:33 PM	PH3 MFC set to  0.000000
1/31/2012	12:25:33 PM	SiCl4 MFC set to  0.000000
1/31/2012	12:25:33 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	12:25:33 PM	Tube furnace set to 0
1/31/2012	12:26:33 PM	Helium valve closed
1/31/2012	12:26:33 PM	H2 valve closed
1/31/2012	12:26:33 PM	BCl3 valve closed
1/31/2012	12:26:33 PM	PH3 valve closed
1/31/2012	12:26:33 PM	SiCl4 pre valve closed
1/31/2012	12:26:33 PM	SiCl4 post valve closed
1/31/2012	12:26:33 PM	Bypass valve closed
1/31/2012	12:26:33 PM	Bubbler valve closed
1/31/2012	12:26:33 PM	Main Vac valve opened
1/31/2012	12:26:33 PM	Helium MFC set to  0.000000
1/31/2012	12:26:33 PM	H2 MFC set to  0.000000
1/31/2012	12:26:33 PM	BCl3 MFC set to  0.000000
1/31/2012	12:26:33 PM	PH3 MFC set to  0.000000
1/31/2012	12:26:33 PM	SiCl4 MFC set to  0.000000
1/31/2012	12:26:33 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	12:26:34 PM	Tube furnace set to 0
1/31/2012	12:26:35 PM	Run finished at 12:26 PM
1/31/2012	12:26:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/31/2012	1:09:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/31/2012	1:09:15 PM	Recipe started at 1:09 PM
1/31/2012	1:09:15 PM	Helium valve closed
1/31/2012	1:09:15 PM	H2 valve closed
1/31/2012	1:09:15 PM	BCl3 valve closed
1/31/2012	1:09:15 PM	PH3 valve closed
1/31/2012	1:09:15 PM	SiCl4 pre valve closed
1/31/2012	1:09:15 PM	SiCl4 post valve closed
1/31/2012	1:09:15 PM	Main Vac valve closed
1/31/2012	1:09:15 PM	Bubbler valve closed
1/31/2012	1:09:15 PM	Bypass valve opened
1/31/2012	1:09:15 PM	Helium MFC set to  0.000000
1/31/2012	1:09:15 PM	H2 MFC set to  0.000000
1/31/2012	1:09:15 PM	BCl3 MFC set to  0.000000
1/31/2012	1:09:15 PM	PH3 MFC set to  0.000000
1/31/2012	1:09:15 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:09:15 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:09:15 PM	Tube furnace set to 0
1/31/2012	1:09:15 PM	Helium valve closed
1/31/2012	1:09:15 PM	H2 valve closed
1/31/2012	1:09:15 PM	BCl3 valve closed
1/31/2012	1:09:15 PM	PH3 valve closed
1/31/2012	1:09:15 PM	SiCl4 pre valve closed
1/31/2012	1:09:15 PM	SiCl4 post valve closed
1/31/2012	1:09:15 PM	Main Vac valve closed
1/31/2012	1:09:15 PM	Bubbler valve closed
1/31/2012	1:09:15 PM	Bypass valve opened
1/31/2012	1:09:15 PM	Helium MFC set to  0.000000
1/31/2012	1:09:15 PM	H2 MFC set to  0.000000
1/31/2012	1:09:15 PM	BCl3 MFC set to  0.000000
1/31/2012	1:09:15 PM	PH3 MFC set to  0.000000
1/31/2012	1:09:15 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:09:15 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:09:15 PM	Tube furnace set to 0
1/31/2012	1:09:45 PM	Helium valve closed
1/31/2012	1:09:45 PM	H2 valve closed
1/31/2012	1:09:45 PM	BCl3 valve closed
1/31/2012	1:09:45 PM	PH3 valve closed
1/31/2012	1:09:45 PM	SiCl4 pre valve closed
1/31/2012	1:09:45 PM	SiCl4 post valve closed
1/31/2012	1:09:45 PM	Bypass valve closed
1/31/2012	1:09:45 PM	Bubbler valve closed
1/31/2012	1:09:45 PM	Main Vac valve opened
1/31/2012	1:09:45 PM	Helium MFC set to  0.000000
1/31/2012	1:09:45 PM	H2 MFC set to  0.000000
1/31/2012	1:09:45 PM	BCl3 MFC set to  0.000000
1/31/2012	1:09:45 PM	PH3 MFC set to  0.000000
1/31/2012	1:09:45 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:09:45 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:09:46 PM	Tube furnace set to 0
1/31/2012	1:10:16 PM	H2 valve closed
1/31/2012	1:10:16 PM	BCl3 valve closed
1/31/2012	1:10:16 PM	PH3 valve closed
1/31/2012	1:10:16 PM	SiCl4 pre valve closed
1/31/2012	1:10:16 PM	SiCl4 post valve closed
1/31/2012	1:10:16 PM	Bypass valve closed
1/31/2012	1:10:16 PM	Bubbler valve closed
1/31/2012	1:10:16 PM	Helium valve opened
1/31/2012	1:10:16 PM	Main Vac valve opened
1/31/2012	1:10:16 PM	Helium MFC set to  20.000000
1/31/2012	1:10:16 PM	H2 MFC set to  0.000000
1/31/2012	1:10:16 PM	BCl3 MFC set to  0.000000
1/31/2012	1:10:16 PM	PH3 MFC set to  0.000000
1/31/2012	1:10:16 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:10:16 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:10:16 PM	Tube furnace set to 0
1/31/2012	1:10:46 PM	Helium valve closed
1/31/2012	1:10:46 PM	H2 valve closed
1/31/2012	1:10:46 PM	BCl3 valve closed
1/31/2012	1:10:46 PM	PH3 valve closed
1/31/2012	1:10:46 PM	SiCl4 pre valve closed
1/31/2012	1:10:46 PM	SiCl4 post valve closed
1/31/2012	1:10:46 PM	Bypass valve closed
1/31/2012	1:10:46 PM	Bubbler valve closed
1/31/2012	1:10:46 PM	Main Vac valve opened
1/31/2012	1:10:46 PM	Helium MFC set to  0.000000
1/31/2012	1:10:46 PM	H2 MFC set to  0.000000
1/31/2012	1:10:46 PM	BCl3 MFC set to  0.000000
1/31/2012	1:10:46 PM	PH3 MFC set to  0.000000
1/31/2012	1:10:46 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:10:46 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:10:46 PM	Tube furnace set to 0
1/31/2012	1:11:16 PM	H2 valve closed
1/31/2012	1:11:16 PM	BCl3 valve closed
1/31/2012	1:11:16 PM	PH3 valve closed
1/31/2012	1:11:16 PM	SiCl4 pre valve closed
1/31/2012	1:11:16 PM	SiCl4 post valve closed
1/31/2012	1:11:16 PM	Bypass valve closed
1/31/2012	1:11:16 PM	Bubbler valve closed
1/31/2012	1:11:16 PM	Helium valve opened
1/31/2012	1:11:16 PM	Main Vac valve opened
1/31/2012	1:11:16 PM	Helium MFC set to  20.000000
1/31/2012	1:11:16 PM	H2 MFC set to  0.000000
1/31/2012	1:11:16 PM	BCl3 MFC set to  0.000000
1/31/2012	1:11:16 PM	PH3 MFC set to  0.000000
1/31/2012	1:11:16 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:11:16 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:11:16 PM	Tube furnace set to 0
1/31/2012	1:11:46 PM	Helium valve closed
1/31/2012	1:11:46 PM	H2 valve closed
1/31/2012	1:11:46 PM	BCl3 valve closed
1/31/2012	1:11:46 PM	PH3 valve closed
1/31/2012	1:11:46 PM	SiCl4 pre valve closed
1/31/2012	1:11:46 PM	SiCl4 post valve closed
1/31/2012	1:11:46 PM	Bypass valve closed
1/31/2012	1:11:46 PM	Bubbler valve closed
1/31/2012	1:11:46 PM	Main Vac valve opened
1/31/2012	1:11:46 PM	Helium MFC set to  0.000000
1/31/2012	1:11:46 PM	H2 MFC set to  0.000000
1/31/2012	1:11:46 PM	BCl3 MFC set to  0.000000
1/31/2012	1:11:46 PM	PH3 MFC set to  0.000000
1/31/2012	1:11:46 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:11:46 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:11:46 PM	Tube furnace set to 0
1/31/2012	1:12:16 PM	H2 valve closed
1/31/2012	1:12:16 PM	BCl3 valve closed
1/31/2012	1:12:16 PM	PH3 valve closed
1/31/2012	1:12:16 PM	SiCl4 pre valve closed
1/31/2012	1:12:16 PM	SiCl4 post valve closed
1/31/2012	1:12:16 PM	Bypass valve closed
1/31/2012	1:12:16 PM	Bubbler valve closed
1/31/2012	1:12:16 PM	Helium valve opened
1/31/2012	1:12:16 PM	Main Vac valve opened
1/31/2012	1:12:16 PM	Helium MFC set to  20.000000
1/31/2012	1:12:16 PM	H2 MFC set to  0.000000
1/31/2012	1:12:16 PM	BCl3 MFC set to  0.000000
1/31/2012	1:12:16 PM	PH3 MFC set to  0.000000
1/31/2012	1:12:16 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:12:16 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:12:17 PM	Tube furnace set to 0
1/31/2012	1:12:47 PM	Helium valve closed
1/31/2012	1:12:47 PM	H2 valve closed
1/31/2012	1:12:47 PM	BCl3 valve closed
1/31/2012	1:12:47 PM	PH3 valve closed
1/31/2012	1:12:47 PM	SiCl4 pre valve closed
1/31/2012	1:12:47 PM	SiCl4 post valve closed
1/31/2012	1:12:47 PM	Bypass valve closed
1/31/2012	1:12:47 PM	Bubbler valve closed
1/31/2012	1:12:47 PM	Main Vac valve opened
1/31/2012	1:12:47 PM	Helium MFC set to  0.000000
1/31/2012	1:12:47 PM	H2 MFC set to  0.000000
1/31/2012	1:12:47 PM	BCl3 MFC set to  0.000000
1/31/2012	1:12:47 PM	PH3 MFC set to  0.000000
1/31/2012	1:12:47 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:12:47 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:12:47 PM	Tube furnace set to 0
1/31/2012	1:13:17 PM	H2 valve closed
1/31/2012	1:13:17 PM	BCl3 valve closed
1/31/2012	1:13:17 PM	PH3 valve closed
1/31/2012	1:13:17 PM	SiCl4 pre valve closed
1/31/2012	1:13:17 PM	SiCl4 post valve closed
1/31/2012	1:13:17 PM	Bypass valve closed
1/31/2012	1:13:17 PM	Bubbler valve closed
1/31/2012	1:13:17 PM	Helium valve opened
1/31/2012	1:13:17 PM	Main Vac valve opened
1/31/2012	1:13:17 PM	Helium MFC set to  20.000000
1/31/2012	1:13:17 PM	H2 MFC set to  0.000000
1/31/2012	1:13:17 PM	BCl3 MFC set to  0.000000
1/31/2012	1:13:17 PM	PH3 MFC set to  0.000000
1/31/2012	1:13:17 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:13:17 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:13:17 PM	Tube furnace set to 0
1/31/2012	1:13:47 PM	Helium valve closed
1/31/2012	1:13:47 PM	H2 valve closed
1/31/2012	1:13:47 PM	BCl3 valve closed
1/31/2012	1:13:47 PM	PH3 valve closed
1/31/2012	1:13:47 PM	SiCl4 pre valve closed
1/31/2012	1:13:47 PM	SiCl4 post valve closed
1/31/2012	1:13:47 PM	Bypass valve closed
1/31/2012	1:13:47 PM	Bubbler valve closed
1/31/2012	1:13:47 PM	Main Vac valve opened
1/31/2012	1:13:47 PM	Helium MFC set to  0.000000
1/31/2012	1:13:47 PM	H2 MFC set to  0.000000
1/31/2012	1:13:47 PM	BCl3 MFC set to  0.000000
1/31/2012	1:13:47 PM	PH3 MFC set to  0.000000
1/31/2012	1:13:47 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:13:47 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:13:47 PM	Tube furnace set to 0
1/31/2012	1:14:17 PM	H2 valve closed
1/31/2012	1:14:17 PM	BCl3 valve closed
1/31/2012	1:14:17 PM	PH3 valve closed
1/31/2012	1:14:17 PM	SiCl4 pre valve closed
1/31/2012	1:14:17 PM	SiCl4 post valve closed
1/31/2012	1:14:17 PM	Bypass valve closed
1/31/2012	1:14:17 PM	Bubbler valve closed
1/31/2012	1:14:17 PM	Helium valve opened
1/31/2012	1:14:17 PM	Main Vac valve opened
1/31/2012	1:14:17 PM	Helium MFC set to  20.000000
1/31/2012	1:14:17 PM	H2 MFC set to  0.000000
1/31/2012	1:14:17 PM	BCl3 MFC set to  0.000000
1/31/2012	1:14:17 PM	PH3 MFC set to  0.000000
1/31/2012	1:14:17 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:14:17 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:14:17 PM	Tube furnace set to 0
1/31/2012	1:14:47 PM	Helium valve closed
1/31/2012	1:14:47 PM	H2 valve closed
1/31/2012	1:14:47 PM	BCl3 valve closed
1/31/2012	1:14:47 PM	PH3 valve closed
1/31/2012	1:14:47 PM	SiCl4 pre valve closed
1/31/2012	1:14:47 PM	SiCl4 post valve closed
1/31/2012	1:14:47 PM	Bypass valve closed
1/31/2012	1:14:47 PM	Bubbler valve closed
1/31/2012	1:14:47 PM	Main Vac valve opened
1/31/2012	1:14:47 PM	Helium MFC set to  0.000000
1/31/2012	1:14:47 PM	H2 MFC set to  0.000000
1/31/2012	1:14:47 PM	BCl3 MFC set to  0.000000
1/31/2012	1:14:47 PM	PH3 MFC set to  0.000000
1/31/2012	1:14:47 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:14:47 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:14:48 PM	Tube furnace set to 0
1/31/2012	1:15:18 PM	H2 valve closed
1/31/2012	1:15:18 PM	BCl3 valve closed
1/31/2012	1:15:18 PM	PH3 valve closed
1/31/2012	1:15:18 PM	SiCl4 pre valve closed
1/31/2012	1:15:18 PM	SiCl4 post valve closed
1/31/2012	1:15:18 PM	Bypass valve closed
1/31/2012	1:15:18 PM	Bubbler valve closed
1/31/2012	1:15:18 PM	Helium valve opened
1/31/2012	1:15:18 PM	Main Vac valve opened
1/31/2012	1:15:18 PM	Helium MFC set to  20.000000
1/31/2012	1:15:18 PM	H2 MFC set to  0.000000
1/31/2012	1:15:18 PM	BCl3 MFC set to  0.000000
1/31/2012	1:15:18 PM	PH3 MFC set to  0.000000
1/31/2012	1:15:18 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:15:18 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:15:18 PM	Tube furnace set to 0
1/31/2012	1:15:48 PM	Helium valve closed
1/31/2012	1:15:48 PM	H2 valve closed
1/31/2012	1:15:48 PM	BCl3 valve closed
1/31/2012	1:15:48 PM	PH3 valve closed
1/31/2012	1:15:48 PM	SiCl4 pre valve closed
1/31/2012	1:15:48 PM	SiCl4 post valve closed
1/31/2012	1:15:48 PM	Bypass valve closed
1/31/2012	1:15:48 PM	Bubbler valve closed
1/31/2012	1:15:48 PM	Main Vac valve opened
1/31/2012	1:15:48 PM	Helium MFC set to  0.000000
1/31/2012	1:15:48 PM	H2 MFC set to  0.000000
1/31/2012	1:15:48 PM	BCl3 MFC set to  0.000000
1/31/2012	1:15:48 PM	PH3 MFC set to  0.000000
1/31/2012	1:15:48 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:15:48 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:15:48 PM	Tube furnace set to 0
1/31/2012	1:16:18 PM	H2 valve closed
1/31/2012	1:16:18 PM	BCl3 valve closed
1/31/2012	1:16:18 PM	PH3 valve closed
1/31/2012	1:16:18 PM	SiCl4 pre valve closed
1/31/2012	1:16:18 PM	SiCl4 post valve closed
1/31/2012	1:16:18 PM	Bypass valve closed
1/31/2012	1:16:18 PM	Bubbler valve closed
1/31/2012	1:16:18 PM	Helium valve opened
1/31/2012	1:16:18 PM	Main Vac valve opened
1/31/2012	1:16:18 PM	Helium MFC set to  20.000000
1/31/2012	1:16:18 PM	H2 MFC set to  0.000000
1/31/2012	1:16:18 PM	BCl3 MFC set to  0.000000
1/31/2012	1:16:18 PM	PH3 MFC set to  0.000000
1/31/2012	1:16:18 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:16:18 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:16:18 PM	Tube furnace set to 0
1/31/2012	1:16:48 PM	Helium valve closed
1/31/2012	1:16:48 PM	H2 valve closed
1/31/2012	1:16:48 PM	BCl3 valve closed
1/31/2012	1:16:48 PM	PH3 valve closed
1/31/2012	1:16:48 PM	SiCl4 pre valve closed
1/31/2012	1:16:48 PM	SiCl4 post valve closed
1/31/2012	1:16:48 PM	Bypass valve closed
1/31/2012	1:16:48 PM	Bubbler valve closed
1/31/2012	1:16:48 PM	Main Vac valve opened
1/31/2012	1:16:48 PM	Helium MFC set to  0.000000
1/31/2012	1:16:48 PM	H2 MFC set to  0.000000
1/31/2012	1:16:48 PM	BCl3 MFC set to  0.000000
1/31/2012	1:16:48 PM	PH3 MFC set to  0.000000
1/31/2012	1:16:48 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:16:48 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:16:48 PM	Tube furnace set to 0
1/31/2012	1:17:18 PM	H2 valve closed
1/31/2012	1:17:18 PM	BCl3 valve closed
1/31/2012	1:17:18 PM	PH3 valve closed
1/31/2012	1:17:18 PM	SiCl4 pre valve closed
1/31/2012	1:17:18 PM	SiCl4 post valve closed
1/31/2012	1:17:18 PM	Bypass valve closed
1/31/2012	1:17:18 PM	Bubbler valve closed
1/31/2012	1:17:18 PM	Helium valve opened
1/31/2012	1:17:18 PM	Main Vac valve opened
1/31/2012	1:17:18 PM	Helium MFC set to  20.000000
1/31/2012	1:17:18 PM	H2 MFC set to  0.000000
1/31/2012	1:17:18 PM	BCl3 MFC set to  0.000000
1/31/2012	1:17:18 PM	PH3 MFC set to  0.000000
1/31/2012	1:17:18 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:17:18 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:17:19 PM	Tube furnace set to 0
1/31/2012	1:17:49 PM	Helium valve closed
1/31/2012	1:17:49 PM	H2 valve closed
1/31/2012	1:17:49 PM	BCl3 valve closed
1/31/2012	1:17:49 PM	PH3 valve closed
1/31/2012	1:17:49 PM	SiCl4 pre valve closed
1/31/2012	1:17:49 PM	SiCl4 post valve closed
1/31/2012	1:17:49 PM	Bypass valve closed
1/31/2012	1:17:49 PM	Bubbler valve closed
1/31/2012	1:17:49 PM	Main Vac valve opened
1/31/2012	1:17:49 PM	Helium MFC set to  0.000000
1/31/2012	1:17:49 PM	H2 MFC set to  0.000000
1/31/2012	1:17:49 PM	BCl3 MFC set to  0.000000
1/31/2012	1:17:49 PM	PH3 MFC set to  0.000000
1/31/2012	1:17:49 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:17:49 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:17:49 PM	Tube furnace set to 0
1/31/2012	1:18:19 PM	H2 valve closed
1/31/2012	1:18:19 PM	BCl3 valve closed
1/31/2012	1:18:19 PM	PH3 valve closed
1/31/2012	1:18:19 PM	SiCl4 pre valve closed
1/31/2012	1:18:19 PM	SiCl4 post valve closed
1/31/2012	1:18:19 PM	Bypass valve closed
1/31/2012	1:18:19 PM	Bubbler valve closed
1/31/2012	1:18:19 PM	Helium valve opened
1/31/2012	1:18:19 PM	Main Vac valve opened
1/31/2012	1:18:19 PM	Helium MFC set to  20.000000
1/31/2012	1:18:19 PM	H2 MFC set to  0.000000
1/31/2012	1:18:19 PM	BCl3 MFC set to  0.000000
1/31/2012	1:18:19 PM	PH3 MFC set to  0.000000
1/31/2012	1:18:19 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:18:19 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:18:19 PM	Tube furnace set to 0
1/31/2012	1:18:49 PM	Helium valve closed
1/31/2012	1:18:49 PM	H2 valve closed
1/31/2012	1:18:49 PM	BCl3 valve closed
1/31/2012	1:18:49 PM	PH3 valve closed
1/31/2012	1:18:49 PM	SiCl4 pre valve closed
1/31/2012	1:18:49 PM	SiCl4 post valve closed
1/31/2012	1:18:49 PM	Bypass valve closed
1/31/2012	1:18:49 PM	Bubbler valve closed
1/31/2012	1:18:49 PM	Main Vac valve opened
1/31/2012	1:18:49 PM	Helium MFC set to  0.000000
1/31/2012	1:18:49 PM	H2 MFC set to  0.000000
1/31/2012	1:18:49 PM	BCl3 MFC set to  0.000000
1/31/2012	1:18:49 PM	PH3 MFC set to  0.000000
1/31/2012	1:18:49 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:18:49 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:18:49 PM	Tube furnace set to 0
1/31/2012	1:19:19 PM	H2 valve closed
1/31/2012	1:19:19 PM	BCl3 valve closed
1/31/2012	1:19:19 PM	PH3 valve closed
1/31/2012	1:19:19 PM	SiCl4 pre valve closed
1/31/2012	1:19:19 PM	SiCl4 post valve closed
1/31/2012	1:19:19 PM	Bypass valve closed
1/31/2012	1:19:19 PM	Bubbler valve closed
1/31/2012	1:19:19 PM	Helium valve opened
1/31/2012	1:19:19 PM	Main Vac valve opened
1/31/2012	1:19:19 PM	Helium MFC set to  20.000000
1/31/2012	1:19:19 PM	H2 MFC set to  0.000000
1/31/2012	1:19:19 PM	BCl3 MFC set to  0.000000
1/31/2012	1:19:19 PM	PH3 MFC set to  0.000000
1/31/2012	1:19:19 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:19:19 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:19:20 PM	Tube furnace set to 0
1/31/2012	1:19:50 PM	Helium valve closed
1/31/2012	1:19:50 PM	H2 valve closed
1/31/2012	1:19:50 PM	BCl3 valve closed
1/31/2012	1:19:50 PM	PH3 valve closed
1/31/2012	1:19:50 PM	SiCl4 pre valve closed
1/31/2012	1:19:50 PM	SiCl4 post valve closed
1/31/2012	1:19:50 PM	Bypass valve closed
1/31/2012	1:19:50 PM	Bubbler valve closed
1/31/2012	1:19:50 PM	Main Vac valve opened
1/31/2012	1:19:50 PM	Helium MFC set to  0.000000
1/31/2012	1:19:50 PM	H2 MFC set to  0.000000
1/31/2012	1:19:50 PM	BCl3 MFC set to  0.000000
1/31/2012	1:19:50 PM	PH3 MFC set to  0.000000
1/31/2012	1:19:50 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:19:50 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:19:50 PM	Tube furnace set to 0
1/31/2012	1:19:51 PM	Run finished at 1:19 PM
1/31/2012	1:19:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/31/2012	1:20:27 PM	Main Vac valve closed
1/31/2012	1:20:41 PM	Main Vac valve opened
1/31/2012	1:21:00 PM	Main Vac valve closed
1/31/2012	1:21:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/31/2012	1:21:25 PM	Recipe started at 1:21 PM
1/31/2012	1:21:25 PM	Helium valve closed
1/31/2012	1:21:25 PM	H2 valve closed
1/31/2012	1:21:25 PM	BCl3 valve closed
1/31/2012	1:21:25 PM	PH3 valve closed
1/31/2012	1:21:25 PM	SiCl4 pre valve closed
1/31/2012	1:21:25 PM	SiCl4 post valve closed
1/31/2012	1:21:25 PM	Main Vac valve closed
1/31/2012	1:21:25 PM	Bubbler valve closed
1/31/2012	1:21:25 PM	Bypass valve opened
1/31/2012	1:21:25 PM	Helium MFC set to  0.000000
1/31/2012	1:21:25 PM	H2 MFC set to  0.000000
1/31/2012	1:21:25 PM	BCl3 MFC set to  0.000000
1/31/2012	1:21:25 PM	PH3 MFC set to  0.000000
1/31/2012	1:21:25 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:21:25 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:21:25 PM	Tube furnace set to 0
1/31/2012	1:21:25 PM	Helium valve closed
1/31/2012	1:21:25 PM	H2 valve closed
1/31/2012	1:21:25 PM	BCl3 valve closed
1/31/2012	1:21:25 PM	PH3 valve closed
1/31/2012	1:21:25 PM	SiCl4 pre valve closed
1/31/2012	1:21:25 PM	SiCl4 post valve closed
1/31/2012	1:21:25 PM	Main Vac valve closed
1/31/2012	1:21:25 PM	Bubbler valve closed
1/31/2012	1:21:25 PM	Bypass valve opened
1/31/2012	1:21:25 PM	Helium MFC set to  0.000000
1/31/2012	1:21:25 PM	H2 MFC set to  0.000000
1/31/2012	1:21:25 PM	BCl3 MFC set to  0.000000
1/31/2012	1:21:25 PM	PH3 MFC set to  0.000000
1/31/2012	1:21:25 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:21:25 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:21:26 PM	Tube furnace set to 0
1/31/2012	1:21:34 PM	Helium valve closed
1/31/2012	1:21:34 PM	H2 valve closed
1/31/2012	1:21:34 PM	BCl3 valve closed
1/31/2012	1:21:34 PM	PH3 valve closed
1/31/2012	1:21:34 PM	SiCl4 pre valve closed
1/31/2012	1:21:34 PM	SiCl4 post valve closed
1/31/2012	1:21:34 PM	Bypass valve closed
1/31/2012	1:21:34 PM	Bubbler valve closed
1/31/2012	1:21:34 PM	Main Vac valve opened
1/31/2012	1:21:34 PM	Helium MFC set to  0.000000
1/31/2012	1:21:34 PM	H2 MFC set to  0.000000
1/31/2012	1:21:34 PM	BCl3 MFC set to  0.000000
1/31/2012	1:21:34 PM	PH3 MFC set to  0.000000
1/31/2012	1:21:34 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:21:34 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:21:34 PM	Tube furnace set to 0
1/31/2012	1:21:41 PM	H2 valve closed
1/31/2012	1:21:41 PM	BCl3 valve closed
1/31/2012	1:21:41 PM	PH3 valve closed
1/31/2012	1:21:41 PM	SiCl4 pre valve closed
1/31/2012	1:21:41 PM	SiCl4 post valve closed
1/31/2012	1:21:41 PM	Bypass valve closed
1/31/2012	1:21:41 PM	Bubbler valve closed
1/31/2012	1:21:41 PM	Helium valve opened
1/31/2012	1:21:41 PM	Main Vac valve opened
1/31/2012	1:21:41 PM	Helium MFC set to  20.000000
1/31/2012	1:21:41 PM	H2 MFC set to  0.000000
1/31/2012	1:21:41 PM	BCl3 MFC set to  0.000000
1/31/2012	1:21:41 PM	PH3 MFC set to  0.000000
1/31/2012	1:21:41 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:21:41 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:21:41 PM	Tube furnace set to 0
1/31/2012	1:22:11 PM	Helium valve closed
1/31/2012	1:22:11 PM	H2 valve closed
1/31/2012	1:22:11 PM	BCl3 valve closed
1/31/2012	1:22:11 PM	PH3 valve closed
1/31/2012	1:22:11 PM	SiCl4 pre valve closed
1/31/2012	1:22:11 PM	SiCl4 post valve closed
1/31/2012	1:22:11 PM	Bypass valve closed
1/31/2012	1:22:11 PM	Bubbler valve closed
1/31/2012	1:22:11 PM	Main Vac valve opened
1/31/2012	1:22:11 PM	Helium MFC set to  0.000000
1/31/2012	1:22:11 PM	H2 MFC set to  0.000000
1/31/2012	1:22:11 PM	BCl3 MFC set to  0.000000
1/31/2012	1:22:11 PM	PH3 MFC set to  0.000000
1/31/2012	1:22:11 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:22:11 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:22:11 PM	Tube furnace set to 0
1/31/2012	1:22:41 PM	H2 valve closed
1/31/2012	1:22:41 PM	BCl3 valve closed
1/31/2012	1:22:41 PM	PH3 valve closed
1/31/2012	1:22:41 PM	SiCl4 pre valve closed
1/31/2012	1:22:41 PM	SiCl4 post valve closed
1/31/2012	1:22:41 PM	Bypass valve closed
1/31/2012	1:22:41 PM	Bubbler valve closed
1/31/2012	1:22:41 PM	Helium valve opened
1/31/2012	1:22:41 PM	Main Vac valve opened
1/31/2012	1:22:41 PM	Helium MFC set to  20.000000
1/31/2012	1:22:41 PM	H2 MFC set to  0.000000
1/31/2012	1:22:41 PM	BCl3 MFC set to  0.000000
1/31/2012	1:22:41 PM	PH3 MFC set to  0.000000
1/31/2012	1:22:41 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:22:41 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:22:42 PM	Tube furnace set to 0
1/31/2012	1:23:12 PM	Helium valve closed
1/31/2012	1:23:12 PM	H2 valve closed
1/31/2012	1:23:12 PM	BCl3 valve closed
1/31/2012	1:23:12 PM	PH3 valve closed
1/31/2012	1:23:12 PM	SiCl4 pre valve closed
1/31/2012	1:23:12 PM	SiCl4 post valve closed
1/31/2012	1:23:12 PM	Bypass valve closed
1/31/2012	1:23:12 PM	Bubbler valve closed
1/31/2012	1:23:12 PM	Main Vac valve opened
1/31/2012	1:23:12 PM	Helium MFC set to  0.000000
1/31/2012	1:23:12 PM	H2 MFC set to  0.000000
1/31/2012	1:23:12 PM	BCl3 MFC set to  0.000000
1/31/2012	1:23:12 PM	PH3 MFC set to  0.000000
1/31/2012	1:23:12 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:23:12 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:23:12 PM	Tube furnace set to 0
1/31/2012	1:23:42 PM	H2 valve closed
1/31/2012	1:23:42 PM	BCl3 valve closed
1/31/2012	1:23:42 PM	PH3 valve closed
1/31/2012	1:23:42 PM	SiCl4 pre valve closed
1/31/2012	1:23:42 PM	SiCl4 post valve closed
1/31/2012	1:23:42 PM	Bypass valve closed
1/31/2012	1:23:42 PM	Bubbler valve closed
1/31/2012	1:23:42 PM	Helium valve opened
1/31/2012	1:23:42 PM	Main Vac valve opened
1/31/2012	1:23:42 PM	Helium MFC set to  20.000000
1/31/2012	1:23:42 PM	H2 MFC set to  0.000000
1/31/2012	1:23:42 PM	BCl3 MFC set to  0.000000
1/31/2012	1:23:42 PM	PH3 MFC set to  0.000000
1/31/2012	1:23:42 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:23:42 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:23:42 PM	Tube furnace set to 0
1/31/2012	1:24:12 PM	Helium valve closed
1/31/2012	1:24:12 PM	H2 valve closed
1/31/2012	1:24:12 PM	BCl3 valve closed
1/31/2012	1:24:12 PM	PH3 valve closed
1/31/2012	1:24:12 PM	SiCl4 pre valve closed
1/31/2012	1:24:12 PM	SiCl4 post valve closed
1/31/2012	1:24:12 PM	Bypass valve closed
1/31/2012	1:24:12 PM	Bubbler valve closed
1/31/2012	1:24:12 PM	Main Vac valve opened
1/31/2012	1:24:12 PM	Helium MFC set to  0.000000
1/31/2012	1:24:12 PM	H2 MFC set to  0.000000
1/31/2012	1:24:12 PM	BCl3 MFC set to  0.000000
1/31/2012	1:24:12 PM	PH3 MFC set to  0.000000
1/31/2012	1:24:12 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:24:12 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:24:12 PM	Tube furnace set to 0
1/31/2012	1:24:42 PM	H2 valve closed
1/31/2012	1:24:42 PM	BCl3 valve closed
1/31/2012	1:24:42 PM	PH3 valve closed
1/31/2012	1:24:42 PM	SiCl4 pre valve closed
1/31/2012	1:24:42 PM	SiCl4 post valve closed
1/31/2012	1:24:42 PM	Bypass valve closed
1/31/2012	1:24:42 PM	Bubbler valve closed
1/31/2012	1:24:42 PM	Helium valve opened
1/31/2012	1:24:42 PM	Main Vac valve opened
1/31/2012	1:24:42 PM	Helium MFC set to  20.000000
1/31/2012	1:24:42 PM	H2 MFC set to  0.000000
1/31/2012	1:24:42 PM	BCl3 MFC set to  0.000000
1/31/2012	1:24:42 PM	PH3 MFC set to  0.000000
1/31/2012	1:24:42 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:24:42 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:24:42 PM	Tube furnace set to 0
1/31/2012	1:25:12 PM	Helium valve closed
1/31/2012	1:25:12 PM	H2 valve closed
1/31/2012	1:25:12 PM	BCl3 valve closed
1/31/2012	1:25:12 PM	PH3 valve closed
1/31/2012	1:25:12 PM	SiCl4 pre valve closed
1/31/2012	1:25:12 PM	SiCl4 post valve closed
1/31/2012	1:25:12 PM	Bypass valve closed
1/31/2012	1:25:13 PM	Bubbler valve closed
1/31/2012	1:25:13 PM	Main Vac valve opened
1/31/2012	1:25:13 PM	Helium MFC set to  0.000000
1/31/2012	1:25:13 PM	H2 MFC set to  0.000000
1/31/2012	1:25:13 PM	BCl3 MFC set to  0.000000
1/31/2012	1:25:13 PM	PH3 MFC set to  0.000000
1/31/2012	1:25:13 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:25:13 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:25:13 PM	Tube furnace set to 0
1/31/2012	1:25:43 PM	H2 valve closed
1/31/2012	1:25:43 PM	BCl3 valve closed
1/31/2012	1:25:43 PM	PH3 valve closed
1/31/2012	1:25:43 PM	SiCl4 pre valve closed
1/31/2012	1:25:43 PM	SiCl4 post valve closed
1/31/2012	1:25:43 PM	Bypass valve closed
1/31/2012	1:25:43 PM	Bubbler valve closed
1/31/2012	1:25:43 PM	Helium valve opened
1/31/2012	1:25:43 PM	Main Vac valve opened
1/31/2012	1:25:43 PM	Helium MFC set to  20.000000
1/31/2012	1:25:43 PM	H2 MFC set to  0.000000
1/31/2012	1:25:43 PM	BCl3 MFC set to  0.000000
1/31/2012	1:25:43 PM	PH3 MFC set to  0.000000
1/31/2012	1:25:43 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:25:43 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:25:43 PM	Tube furnace set to 0
1/31/2012	1:26:13 PM	Helium valve closed
1/31/2012	1:26:13 PM	H2 valve closed
1/31/2012	1:26:13 PM	BCl3 valve closed
1/31/2012	1:26:13 PM	PH3 valve closed
1/31/2012	1:26:13 PM	SiCl4 pre valve closed
1/31/2012	1:26:13 PM	SiCl4 post valve closed
1/31/2012	1:26:13 PM	Bypass valve closed
1/31/2012	1:26:13 PM	Bubbler valve closed
1/31/2012	1:26:13 PM	Main Vac valve opened
1/31/2012	1:26:13 PM	Helium MFC set to  0.000000
1/31/2012	1:26:13 PM	H2 MFC set to  0.000000
1/31/2012	1:26:13 PM	BCl3 MFC set to  0.000000
1/31/2012	1:26:13 PM	PH3 MFC set to  0.000000
1/31/2012	1:26:13 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:26:13 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:26:13 PM	Tube furnace set to 0
1/31/2012	1:26:43 PM	H2 valve closed
1/31/2012	1:26:43 PM	BCl3 valve closed
1/31/2012	1:26:43 PM	PH3 valve closed
1/31/2012	1:26:43 PM	SiCl4 pre valve closed
1/31/2012	1:26:43 PM	SiCl4 post valve closed
1/31/2012	1:26:43 PM	Bypass valve closed
1/31/2012	1:26:43 PM	Bubbler valve closed
1/31/2012	1:26:43 PM	Helium valve opened
1/31/2012	1:26:43 PM	Main Vac valve opened
1/31/2012	1:26:43 PM	Helium MFC set to  20.000000
1/31/2012	1:26:43 PM	H2 MFC set to  0.000000
1/31/2012	1:26:43 PM	BCl3 MFC set to  0.000000
1/31/2012	1:26:43 PM	PH3 MFC set to  0.000000
1/31/2012	1:26:43 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:26:43 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:26:43 PM	Tube furnace set to 0
1/31/2012	1:27:13 PM	Helium valve closed
1/31/2012	1:27:13 PM	H2 valve closed
1/31/2012	1:27:13 PM	BCl3 valve closed
1/31/2012	1:27:13 PM	PH3 valve closed
1/31/2012	1:27:13 PM	SiCl4 pre valve closed
1/31/2012	1:27:13 PM	SiCl4 post valve closed
1/31/2012	1:27:13 PM	Bypass valve closed
1/31/2012	1:27:13 PM	Bubbler valve closed
1/31/2012	1:27:13 PM	Main Vac valve opened
1/31/2012	1:27:13 PM	Helium MFC set to  0.000000
1/31/2012	1:27:13 PM	H2 MFC set to  0.000000
1/31/2012	1:27:13 PM	BCl3 MFC set to  0.000000
1/31/2012	1:27:13 PM	PH3 MFC set to  0.000000
1/31/2012	1:27:13 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:27:13 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:27:14 PM	Tube furnace set to 0
1/31/2012	1:27:25 PM	Run aborted at 1:27 PM
1/31/2012	1:27:25 PM	Helium valve closed
1/31/2012	1:27:25 PM	H2 valve closed
1/31/2012	1:27:25 PM	BCl3 valve closed
1/31/2012	1:27:25 PM	PH3 valve closed
1/31/2012	1:27:25 PM	SiCl4 pre valve closed
1/31/2012	1:27:25 PM	SiCl4 post valve closed
1/31/2012	1:27:25 PM	Bypass valve closed
1/31/2012	1:27:25 PM	Main Vac valve closed
1/31/2012	1:27:25 PM	Bubbler valve closed
1/31/2012	1:27:25 PM	Helium MFC set to  0.000000
1/31/2012	1:27:25 PM	H2 MFC set to  0.000000
1/31/2012	1:27:25 PM	BCl3 MFC set to  0.000000
1/31/2012	1:27:25 PM	PH3 MFC set to  0.000000
1/31/2012	1:27:25 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:27:25 PM	Tube furnace set to 0
1/31/2012	1:27:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/31/2012	1:27:28 PM	Main Vac valve opened
1/31/2012	1:27:40 PM	Main Vac valve closed
1/31/2012	1:28:00 PM	Main Vac valve opened
1/31/2012	1:28:23 PM	Main Vac valve closed
1/31/2012	1:28:37 PM	Main Vac valve opened
1/31/2012	1:31:05 PM	Recipe started at 1:31 PM
1/31/2012	1:31:05 PM	Helium valve closed
1/31/2012	1:31:05 PM	H2 valve closed
1/31/2012	1:31:05 PM	BCl3 valve closed
1/31/2012	1:31:05 PM	PH3 valve closed
1/31/2012	1:31:05 PM	SiCl4 pre valve closed
1/31/2012	1:31:05 PM	SiCl4 post valve closed
1/31/2012	1:31:05 PM	Main Vac valve closed
1/31/2012	1:31:05 PM	Bypass valve closed
1/31/2012	1:31:05 PM	Bubbler valve closed
1/31/2012	1:31:05 PM	Helium MFC set to  0.000000
1/31/2012	1:31:05 PM	H2 MFC set to  0.000000
1/31/2012	1:31:05 PM	BCl3 MFC set to  0.000000
1/31/2012	1:31:05 PM	PH3 MFC set to  0.000000
1/31/2012	1:31:05 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:31:05 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:31:05 PM	Tube furnace set to 0
1/31/2012	1:31:08 PM	Helium valve closed
1/31/2012	1:31:08 PM	BCl3 valve closed
1/31/2012	1:31:08 PM	PH3 valve closed
1/31/2012	1:31:08 PM	SiCl4 pre valve closed
1/31/2012	1:31:08 PM	SiCl4 post valve closed
1/31/2012	1:31:08 PM	Main Vac valve closed
1/31/2012	1:31:08 PM	Bypass valve closed
1/31/2012	1:31:08 PM	Bubbler valve closed
1/31/2012	1:31:08 PM	H2 valve opened
1/31/2012	1:31:08 PM	Helium MFC set to  0.000000
1/31/2012	1:31:08 PM	H2 MFC set to  500.000000
1/31/2012	1:31:08 PM	BCl3 MFC set to  0.000000
1/31/2012	1:31:08 PM	PH3 MFC set to  0.000000
1/31/2012	1:31:08 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:31:08 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:31:08 PM	Tube furnace set to 0
1/31/2012	1:32:18 PM	Helium valve closed
1/31/2012	1:32:18 PM	BCl3 valve closed
1/31/2012	1:32:18 PM	PH3 valve closed
1/31/2012	1:32:18 PM	SiCl4 pre valve closed
1/31/2012	1:32:18 PM	SiCl4 post valve closed
1/31/2012	1:32:18 PM	Main Vac valve closed
1/31/2012	1:32:18 PM	Bypass valve closed
1/31/2012	1:32:18 PM	H2 valve opened
1/31/2012	1:32:18 PM	Bubbler valve opened
1/31/2012	1:32:18 PM	Helium MFC set to  0.000000
1/31/2012	1:32:18 PM	H2 MFC set to  500.000000
1/31/2012	1:32:18 PM	BCl3 MFC set to  0.000000
1/31/2012	1:32:18 PM	PH3 MFC set to  0.000000
1/31/2012	1:32:18 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:32:18 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:32:18 PM	Tube furnace set to 0
1/31/2012	1:32:19 PM	Helium valve closed
1/31/2012	1:32:19 PM	BCl3 valve closed
1/31/2012	1:32:19 PM	PH3 valve closed
1/31/2012	1:32:19 PM	SiCl4 pre valve closed
1/31/2012	1:32:19 PM	SiCl4 post valve closed
1/31/2012	1:32:19 PM	Main Vac valve closed
1/31/2012	1:32:19 PM	Bypass valve closed
1/31/2012	1:32:19 PM	H2 valve opened
1/31/2012	1:32:19 PM	Bubbler valve opened
1/31/2012	1:32:19 PM	Helium MFC set to  0.000000
1/31/2012	1:32:19 PM	H2 MFC set to  500.000000
1/31/2012	1:32:19 PM	BCl3 MFC set to  0.000000
1/31/2012	1:32:19 PM	PH3 MFC set to  0.000000
1/31/2012	1:32:19 PM	SiCl4 MFC set to  0.000000
1/31/2012	1:32:19 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:32:19 PM	Tube furnace set to 1000
1/31/2012	1:52:19 PM	Helium valve closed
1/31/2012	1:52:19 PM	PH3 valve closed
1/31/2012	1:52:19 PM	Main Vac valve closed
1/31/2012	1:52:19 PM	Bypass valve closed
1/31/2012	1:52:19 PM	H2 valve opened
1/31/2012	1:52:19 PM	BCl3 valve opened
1/31/2012	1:52:19 PM	SiCl4 pre valve opened
1/31/2012	1:52:19 PM	SiCl4 post valve opened
1/31/2012	1:52:19 PM	Bubbler valve opened
1/31/2012	1:52:19 PM	Helium MFC set to  0.000000
1/31/2012	1:52:19 PM	H2 MFC set to  500.000000
1/31/2012	1:52:19 PM	BCl3 MFC set to  1.000000
1/31/2012	1:52:19 PM	PH3 MFC set to  0.000000
1/31/2012	1:52:19 PM	SiCl4 MFC set to  50.000000
1/31/2012	1:52:19 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	1:52:19 PM	Tube furnace set to 1000
1/31/2012	2:09:19 PM	Helium valve closed
1/31/2012	2:09:19 PM	BCl3 valve closed
1/31/2012	2:09:19 PM	PH3 valve closed
1/31/2012	2:09:19 PM	SiCl4 pre valve closed
1/31/2012	2:09:19 PM	SiCl4 post valve closed
1/31/2012	2:09:19 PM	Main Vac valve closed
1/31/2012	2:09:19 PM	Bypass valve closed
1/31/2012	2:09:19 PM	H2 valve opened
1/31/2012	2:09:19 PM	Bubbler valve opened
1/31/2012	2:09:19 PM	Helium MFC set to  0.000000
1/31/2012	2:09:19 PM	H2 MFC set to  500.000000
1/31/2012	2:09:19 PM	BCl3 MFC set to  0.000000
1/31/2012	2:09:19 PM	PH3 MFC set to  0.000000
1/31/2012	2:09:19 PM	SiCl4 MFC set to  0.000000
1/31/2012	2:09:19 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	2:09:19 PM	Tube furnace set to 750
1/31/2012	2:14:20 PM	H2 valve closed
1/31/2012	2:14:20 PM	BCl3 valve closed
1/31/2012	2:14:20 PM	PH3 valve closed
1/31/2012	2:14:20 PM	SiCl4 pre valve closed
1/31/2012	2:14:20 PM	SiCl4 post valve closed
1/31/2012	2:14:20 PM	Main Vac valve closed
1/31/2012	2:14:20 PM	Bypass valve closed
1/31/2012	2:14:20 PM	Helium valve opened
1/31/2012	2:14:20 PM	Bubbler valve opened
1/31/2012	2:14:20 PM	Helium MFC set to  500.000000
1/31/2012	2:14:20 PM	H2 MFC set to  0.000000
1/31/2012	2:14:20 PM	BCl3 MFC set to  0.000000
1/31/2012	2:14:20 PM	PH3 MFC set to  0.000000
1/31/2012	2:14:20 PM	SiCl4 MFC set to  0.000000
1/31/2012	2:14:20 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	2:14:20 PM	Tube furnace set to 0
1/31/2012	2:34:20 PM	Helium valve closed
1/31/2012	2:34:20 PM	H2 valve closed
1/31/2012	2:34:20 PM	BCl3 valve closed
1/31/2012	2:34:20 PM	PH3 valve closed
1/31/2012	2:34:20 PM	SiCl4 pre valve closed
1/31/2012	2:34:20 PM	SiCl4 post valve closed
1/31/2012	2:34:20 PM	Main Vac valve closed
1/31/2012	2:34:20 PM	Bypass valve closed
1/31/2012	2:34:20 PM	Bubbler valve closed
1/31/2012	2:34:20 PM	Helium MFC set to  0.000000
1/31/2012	2:34:20 PM	H2 MFC set to  0.000000
1/31/2012	2:34:20 PM	BCl3 MFC set to  0.000000
1/31/2012	2:34:20 PM	PH3 MFC set to  0.000000
1/31/2012	2:34:20 PM	SiCl4 MFC set to  0.000000
1/31/2012	2:34:20 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	2:34:20 PM	Tube furnace set to 0
1/31/2012	2:34:21 PM	Run finished at 2:34 PM
1/31/2012	2:35:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/31/2012	2:35:19 PM	Recipe started at 2:35 PM
1/31/2012	2:35:19 PM	Helium valve closed
1/31/2012	2:35:19 PM	H2 valve closed
1/31/2012	2:35:19 PM	BCl3 valve closed
1/31/2012	2:35:19 PM	PH3 valve closed
1/31/2012	2:35:19 PM	SiCl4 pre valve closed
1/31/2012	2:35:19 PM	SiCl4 post valve closed
1/31/2012	2:35:19 PM	Main Vac valve closed
1/31/2012	2:35:19 PM	Bypass valve closed
1/31/2012	2:35:19 PM	Bubbler valve closed
1/31/2012	2:35:19 PM	Helium MFC set to  0.000000
1/31/2012	2:35:19 PM	H2 MFC set to  0.000000
1/31/2012	2:35:19 PM	BCl3 MFC set to  0.000000
1/31/2012	2:35:19 PM	PH3 MFC set to  0.000000
1/31/2012	2:35:19 PM	SiCl4 MFC set to  0.000000
1/31/2012	2:35:19 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	2:35:19 PM	Tube furnace set to 0
1/31/2012	2:35:22 PM	H2 valve closed
1/31/2012	2:35:22 PM	BCl3 valve closed
1/31/2012	2:35:22 PM	PH3 valve closed
1/31/2012	2:35:22 PM	SiCl4 pre valve closed
1/31/2012	2:35:22 PM	SiCl4 post valve closed
1/31/2012	2:35:22 PM	Main Vac valve closed
1/31/2012	2:35:22 PM	Bypass valve closed
1/31/2012	2:35:22 PM	Bubbler valve closed
1/31/2012	2:35:22 PM	Helium valve opened
1/31/2012	2:35:22 PM	Helium MFC set to  500.000000
1/31/2012	2:35:22 PM	H2 MFC set to  0.000000
1/31/2012	2:35:22 PM	BCl3 MFC set to  0.000000
1/31/2012	2:35:22 PM	PH3 MFC set to  0.000000
1/31/2012	2:35:22 PM	SiCl4 MFC set to  0.000000
1/31/2012	2:35:22 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	2:35:22 PM	Tube furnace set to 0
1/31/2012	2:35:23 PM	Helium valve closed
1/31/2012	2:35:23 PM	H2 valve closed
1/31/2012	2:35:23 PM	BCl3 valve closed
1/31/2012	2:35:23 PM	PH3 valve closed
1/31/2012	2:35:23 PM	SiCl4 pre valve closed
1/31/2012	2:35:23 PM	SiCl4 post valve closed
1/31/2012	2:35:23 PM	Main Vac valve closed
1/31/2012	2:35:23 PM	Bypass valve closed
1/31/2012	2:35:23 PM	Bubbler valve closed
1/31/2012	2:35:23 PM	Helium MFC set to  0.000000
1/31/2012	2:35:23 PM	H2 MFC set to  0.000000
1/31/2012	2:35:23 PM	BCl3 MFC set to  0.000000
1/31/2012	2:35:23 PM	PH3 MFC set to  0.000000
1/31/2012	2:35:23 PM	SiCl4 MFC set to  0.000000
1/31/2012	2:35:23 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	2:35:23 PM	Tube furnace set to 0
1/31/2012	2:35:24 PM	Run finished at 2:35 PM
1/31/2012	2:35:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/31/2012	2:48:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/31/2012	2:48:21 PM	Recipe started at 2:48 PM
1/31/2012	2:48:21 PM	Helium valve closed
1/31/2012	2:48:21 PM	H2 valve closed
1/31/2012	2:48:21 PM	BCl3 valve closed
1/31/2012	2:48:21 PM	PH3 valve closed
1/31/2012	2:48:21 PM	SiCl4 pre valve closed
1/31/2012	2:48:21 PM	SiCl4 post valve closed
1/31/2012	2:48:21 PM	Main Vac valve closed
1/31/2012	2:48:21 PM	Bubbler valve closed
1/31/2012	2:48:21 PM	Bypass valve opened
1/31/2012	2:48:21 PM	Helium MFC set to  0.000000
1/31/2012	2:48:21 PM	H2 MFC set to  0.000000
1/31/2012	2:48:21 PM	BCl3 MFC set to  0.000000
1/31/2012	2:48:21 PM	PH3 MFC set to  0.000000
1/31/2012	2:48:21 PM	SiCl4 MFC set to  0.000000
1/31/2012	2:48:21 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	2:48:21 PM	Tube furnace set to 0
1/31/2012	2:49:27 PM	Helium valve closed
1/31/2012	2:49:27 PM	H2 valve closed
1/31/2012	2:49:27 PM	BCl3 valve closed
1/31/2012	2:49:27 PM	PH3 valve closed
1/31/2012	2:49:27 PM	SiCl4 pre valve closed
1/31/2012	2:49:27 PM	SiCl4 post valve closed
1/31/2012	2:49:27 PM	Main Vac valve closed
1/31/2012	2:49:27 PM	Bubbler valve closed
1/31/2012	2:49:27 PM	Bypass valve opened
1/31/2012	2:49:27 PM	Helium MFC set to  0.000000
1/31/2012	2:49:27 PM	H2 MFC set to  0.000000
1/31/2012	2:49:27 PM	BCl3 MFC set to  0.000000
1/31/2012	2:49:27 PM	PH3 MFC set to  0.000000
1/31/2012	2:49:27 PM	SiCl4 MFC set to  0.000000
1/31/2012	2:49:27 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	2:49:27 PM	Tube furnace set to 0
1/31/2012	2:50:27 PM	Helium valve closed
1/31/2012	2:50:27 PM	H2 valve closed
1/31/2012	2:50:27 PM	BCl3 valve closed
1/31/2012	2:50:27 PM	PH3 valve closed
1/31/2012	2:50:27 PM	SiCl4 pre valve closed
1/31/2012	2:50:27 PM	SiCl4 post valve closed
1/31/2012	2:50:27 PM	Bypass valve closed
1/31/2012	2:50:27 PM	Bubbler valve closed
1/31/2012	2:50:27 PM	Main Vac valve opened
1/31/2012	2:50:27 PM	Helium MFC set to  0.000000
1/31/2012	2:50:27 PM	H2 MFC set to  0.000000
1/31/2012	2:50:27 PM	BCl3 MFC set to  0.000000
1/31/2012	2:50:27 PM	PH3 MFC set to  0.000000
1/31/2012	2:50:27 PM	SiCl4 MFC set to  0.000000
1/31/2012	2:50:27 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	2:50:27 PM	Tube furnace set to 0
1/31/2012	2:50:28 PM	Run finished at 2:50 PM
1/31/2012	2:50:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/31/2012	2:50:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/31/2012	2:51:04 PM	Recipe started at 2:50 PM
1/31/2012	2:51:04 PM	Helium valve closed
1/31/2012	2:51:04 PM	H2 valve closed
1/31/2012	2:51:04 PM	BCl3 valve closed
1/31/2012	2:51:04 PM	PH3 valve closed
1/31/2012	2:51:04 PM	SiCl4 pre valve closed
1/31/2012	2:51:04 PM	SiCl4 post valve closed
1/31/2012	2:51:04 PM	Main Vac valve closed
1/31/2012	2:51:04 PM	Bubbler valve closed
1/31/2012	2:51:04 PM	Bypass valve opened
1/31/2012	2:51:04 PM	Helium MFC set to  0.000000
1/31/2012	2:51:04 PM	H2 MFC set to  0.000000
1/31/2012	2:51:04 PM	BCl3 MFC set to  0.000000
1/31/2012	2:51:04 PM	PH3 MFC set to  0.000000
1/31/2012	2:51:04 PM	SiCl4 MFC set to  0.000000
1/31/2012	2:51:04 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	2:51:04 PM	Tube furnace set to 0
1/31/2012	2:51:04 PM	Helium valve closed
1/31/2012	2:51:04 PM	H2 valve closed
1/31/2012	2:51:04 PM	BCl3 valve closed
1/31/2012	2:51:05 PM	PH3 valve closed
1/31/2012	2:51:05 PM	SiCl4 pre valve closed
1/31/2012	2:51:05 PM	SiCl4 post valve closed
1/31/2012	2:51:05 PM	Main Vac valve closed
1/31/2012	2:51:05 PM	Bubbler valve closed
1/31/2012	2:51:05 PM	Bypass valve opened
1/31/2012	2:51:05 PM	Helium MFC set to  0.000000
1/31/2012	2:51:05 PM	H2 MFC set to  0.000000
1/31/2012	2:51:05 PM	BCl3 MFC set to  0.000000
1/31/2012	2:51:05 PM	PH3 MFC set to  0.000000
1/31/2012	2:51:05 PM	SiCl4 MFC set to  0.000000
1/31/2012	2:51:05 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	2:51:05 PM	Tube furnace set to 0
1/31/2012	2:51:32 PM	Helium valve closed
1/31/2012	2:51:32 PM	H2 valve closed
1/31/2012	2:51:32 PM	BCl3 valve closed
1/31/2012	2:51:32 PM	PH3 valve closed
1/31/2012	2:51:32 PM	SiCl4 pre valve closed
1/31/2012	2:51:32 PM	SiCl4 post valve closed
1/31/2012	2:51:32 PM	Bypass valve closed
1/31/2012	2:51:32 PM	Bubbler valve closed
1/31/2012	2:51:32 PM	Main Vac valve opened
1/31/2012	2:51:32 PM	Helium MFC set to  0.000000
1/31/2012	2:51:32 PM	H2 MFC set to  0.000000
1/31/2012	2:51:32 PM	BCl3 MFC set to  0.000000
1/31/2012	2:51:32 PM	PH3 MFC set to  0.000000
1/31/2012	2:51:32 PM	SiCl4 MFC set to  0.000000
1/31/2012	2:51:32 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	2:51:32 PM	Tube furnace set to 0
1/31/2012	2:52:02 PM	H2 valve closed
1/31/2012	2:52:02 PM	BCl3 valve closed
1/31/2012	2:52:02 PM	PH3 valve closed
1/31/2012	2:52:02 PM	SiCl4 pre valve closed
1/31/2012	2:52:02 PM	SiCl4 post valve closed
1/31/2012	2:52:02 PM	Bypass valve closed
1/31/2012	2:52:02 PM	Bubbler valve closed
1/31/2012	2:52:02 PM	Helium valve opened
1/31/2012	2:52:02 PM	Main Vac valve opened
1/31/2012	2:52:02 PM	Helium MFC set to  20.000000
1/31/2012	2:52:02 PM	H2 MFC set to  0.000000
1/31/2012	2:52:02 PM	BCl3 MFC set to  0.000000
1/31/2012	2:52:02 PM	PH3 MFC set to  0.000000
1/31/2012	2:52:02 PM	SiCl4 MFC set to  0.000000
1/31/2012	2:52:02 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	2:52:03 PM	Tube furnace set to 0
1/31/2012	2:52:33 PM	Helium valve closed
1/31/2012	2:52:33 PM	H2 valve closed
1/31/2012	2:52:33 PM	BCl3 valve closed
1/31/2012	2:52:33 PM	PH3 valve closed
1/31/2012	2:52:33 PM	SiCl4 pre valve closed
1/31/2012	2:52:33 PM	SiCl4 post valve closed
1/31/2012	2:52:33 PM	Bypass valve closed
1/31/2012	2:52:33 PM	Bubbler valve closed
1/31/2012	2:52:33 PM	Main Vac valve opened
1/31/2012	2:52:33 PM	Helium MFC set to  0.000000
1/31/2012	2:52:33 PM	H2 MFC set to  0.000000
1/31/2012	2:52:33 PM	BCl3 MFC set to  0.000000
1/31/2012	2:52:33 PM	PH3 MFC set to  0.000000
1/31/2012	2:52:33 PM	SiCl4 MFC set to  0.000000
1/31/2012	2:52:33 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	2:52:33 PM	Tube furnace set to 0
1/31/2012	2:53:03 PM	H2 valve closed
1/31/2012	2:53:03 PM	BCl3 valve closed
1/31/2012	2:53:03 PM	PH3 valve closed
1/31/2012	2:53:03 PM	SiCl4 pre valve closed
1/31/2012	2:53:03 PM	SiCl4 post valve closed
1/31/2012	2:53:03 PM	Bypass valve closed
1/31/2012	2:53:03 PM	Bubbler valve closed
1/31/2012	2:53:03 PM	Helium valve opened
1/31/2012	2:53:03 PM	Main Vac valve opened
1/31/2012	2:53:03 PM	Helium MFC set to  20.000000
1/31/2012	2:53:03 PM	H2 MFC set to  0.000000
1/31/2012	2:53:03 PM	BCl3 MFC set to  0.000000
1/31/2012	2:53:03 PM	PH3 MFC set to  0.000000
1/31/2012	2:53:03 PM	SiCl4 MFC set to  0.000000
1/31/2012	2:53:03 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	2:53:03 PM	Tube furnace set to 0
1/31/2012	2:53:33 PM	Helium valve closed
1/31/2012	2:53:33 PM	H2 valve closed
1/31/2012	2:53:33 PM	BCl3 valve closed
1/31/2012	2:53:33 PM	PH3 valve closed
1/31/2012	2:53:33 PM	SiCl4 pre valve closed
1/31/2012	2:53:33 PM	SiCl4 post valve closed
1/31/2012	2:53:33 PM	Bypass valve closed
1/31/2012	2:53:33 PM	Bubbler valve closed
1/31/2012	2:53:33 PM	Main Vac valve opened
1/31/2012	2:53:33 PM	Helium MFC set to  0.000000
1/31/2012	2:53:33 PM	H2 MFC set to  0.000000
1/31/2012	2:53:33 PM	BCl3 MFC set to  0.000000
1/31/2012	2:53:33 PM	PH3 MFC set to  0.000000
1/31/2012	2:53:33 PM	SiCl4 MFC set to  0.000000
1/31/2012	2:53:33 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	2:53:33 PM	Tube furnace set to 0
1/31/2012	2:54:03 PM	H2 valve closed
1/31/2012	2:54:03 PM	BCl3 valve closed
1/31/2012	2:54:03 PM	PH3 valve closed
1/31/2012	2:54:03 PM	SiCl4 pre valve closed
1/31/2012	2:54:03 PM	SiCl4 post valve closed
1/31/2012	2:54:03 PM	Bypass valve closed
1/31/2012	2:54:03 PM	Bubbler valve closed
1/31/2012	2:54:03 PM	Helium valve opened
1/31/2012	2:54:03 PM	Main Vac valve opened
1/31/2012	2:54:03 PM	Helium MFC set to  20.000000
1/31/2012	2:54:03 PM	H2 MFC set to  0.000000
1/31/2012	2:54:03 PM	BCl3 MFC set to  0.000000
1/31/2012	2:54:03 PM	PH3 MFC set to  0.000000
1/31/2012	2:54:03 PM	SiCl4 MFC set to  0.000000
1/31/2012	2:54:03 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	2:54:03 PM	Tube furnace set to 0
1/31/2012	2:54:33 PM	Helium valve closed
1/31/2012	2:54:33 PM	H2 valve closed
1/31/2012	2:54:33 PM	BCl3 valve closed
1/31/2012	2:54:33 PM	PH3 valve closed
1/31/2012	2:54:33 PM	SiCl4 pre valve closed
1/31/2012	2:54:33 PM	SiCl4 post valve closed
1/31/2012	2:54:33 PM	Bypass valve closed
1/31/2012	2:54:33 PM	Bubbler valve closed
1/31/2012	2:54:33 PM	Main Vac valve opened
1/31/2012	2:54:33 PM	Helium MFC set to  0.000000
1/31/2012	2:54:33 PM	H2 MFC set to  0.000000
1/31/2012	2:54:33 PM	BCl3 MFC set to  0.000000
1/31/2012	2:54:33 PM	PH3 MFC set to  0.000000
1/31/2012	2:54:33 PM	SiCl4 MFC set to  0.000000
1/31/2012	2:54:33 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	2:54:34 PM	Tube furnace set to 0
1/31/2012	2:55:04 PM	H2 valve closed
1/31/2012	2:55:04 PM	BCl3 valve closed
1/31/2012	2:55:04 PM	PH3 valve closed
1/31/2012	2:55:04 PM	SiCl4 pre valve closed
1/31/2012	2:55:04 PM	SiCl4 post valve closed
1/31/2012	2:55:04 PM	Bypass valve closed
1/31/2012	2:55:04 PM	Bubbler valve closed
1/31/2012	2:55:04 PM	Helium valve opened
1/31/2012	2:55:04 PM	Main Vac valve opened
1/31/2012	2:55:04 PM	Helium MFC set to  20.000000
1/31/2012	2:55:04 PM	H2 MFC set to  0.000000
1/31/2012	2:55:04 PM	BCl3 MFC set to  0.000000
1/31/2012	2:55:04 PM	PH3 MFC set to  0.000000
1/31/2012	2:55:04 PM	SiCl4 MFC set to  0.000000
1/31/2012	2:55:04 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	2:55:04 PM	Tube furnace set to 0
1/31/2012	2:55:34 PM	Helium valve closed
1/31/2012	2:55:34 PM	H2 valve closed
1/31/2012	2:55:34 PM	BCl3 valve closed
1/31/2012	2:55:34 PM	PH3 valve closed
1/31/2012	2:55:34 PM	SiCl4 pre valve closed
1/31/2012	2:55:34 PM	SiCl4 post valve closed
1/31/2012	2:55:34 PM	Bypass valve closed
1/31/2012	2:55:34 PM	Bubbler valve closed
1/31/2012	2:55:34 PM	Main Vac valve opened
1/31/2012	2:55:34 PM	Helium MFC set to  0.000000
1/31/2012	2:55:34 PM	H2 MFC set to  0.000000
1/31/2012	2:55:34 PM	BCl3 MFC set to  0.000000
1/31/2012	2:55:34 PM	PH3 MFC set to  0.000000
1/31/2012	2:55:34 PM	SiCl4 MFC set to  0.000000
1/31/2012	2:55:34 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	2:55:34 PM	Tube furnace set to 0
1/31/2012	2:56:04 PM	H2 valve closed
1/31/2012	2:56:04 PM	BCl3 valve closed
1/31/2012	2:56:04 PM	PH3 valve closed
1/31/2012	2:56:04 PM	SiCl4 pre valve closed
1/31/2012	2:56:04 PM	SiCl4 post valve closed
1/31/2012	2:56:04 PM	Bypass valve closed
1/31/2012	2:56:04 PM	Bubbler valve closed
1/31/2012	2:56:04 PM	Helium valve opened
1/31/2012	2:56:04 PM	Main Vac valve opened
1/31/2012	2:56:04 PM	Helium MFC set to  20.000000
1/31/2012	2:56:04 PM	H2 MFC set to  0.000000
1/31/2012	2:56:04 PM	BCl3 MFC set to  0.000000
1/31/2012	2:56:04 PM	PH3 MFC set to  0.000000
1/31/2012	2:56:04 PM	SiCl4 MFC set to  0.000000
1/31/2012	2:56:04 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	2:56:04 PM	Tube furnace set to 0
1/31/2012	2:56:34 PM	Helium valve closed
1/31/2012	2:56:34 PM	H2 valve closed
1/31/2012	2:56:34 PM	BCl3 valve closed
1/31/2012	2:56:34 PM	PH3 valve closed
1/31/2012	2:56:34 PM	SiCl4 pre valve closed
1/31/2012	2:56:34 PM	SiCl4 post valve closed
1/31/2012	2:56:34 PM	Bypass valve closed
1/31/2012	2:56:34 PM	Bubbler valve closed
1/31/2012	2:56:34 PM	Main Vac valve opened
1/31/2012	2:56:34 PM	Helium MFC set to  0.000000
1/31/2012	2:56:34 PM	H2 MFC set to  0.000000
1/31/2012	2:56:34 PM	BCl3 MFC set to  0.000000
1/31/2012	2:56:34 PM	PH3 MFC set to  0.000000
1/31/2012	2:56:34 PM	SiCl4 MFC set to  0.000000
1/31/2012	2:56:34 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	2:56:34 PM	Tube furnace set to 0
1/31/2012	2:57:04 PM	H2 valve closed
1/31/2012	2:57:04 PM	BCl3 valve closed
1/31/2012	2:57:04 PM	PH3 valve closed
1/31/2012	2:57:04 PM	SiCl4 pre valve closed
1/31/2012	2:57:04 PM	SiCl4 post valve closed
1/31/2012	2:57:04 PM	Bypass valve closed
1/31/2012	2:57:04 PM	Bubbler valve closed
1/31/2012	2:57:04 PM	Helium valve opened
1/31/2012	2:57:04 PM	Main Vac valve opened
1/31/2012	2:57:04 PM	Helium MFC set to  20.000000
1/31/2012	2:57:04 PM	H2 MFC set to  0.000000
1/31/2012	2:57:04 PM	BCl3 MFC set to  0.000000
1/31/2012	2:57:04 PM	PH3 MFC set to  0.000000
1/31/2012	2:57:04 PM	SiCl4 MFC set to  0.000000
1/31/2012	2:57:04 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	2:57:05 PM	Tube furnace set to 0
1/31/2012	2:57:35 PM	Helium valve closed
1/31/2012	2:57:35 PM	H2 valve closed
1/31/2012	2:57:35 PM	BCl3 valve closed
1/31/2012	2:57:35 PM	PH3 valve closed
1/31/2012	2:57:35 PM	SiCl4 pre valve closed
1/31/2012	2:57:35 PM	SiCl4 post valve closed
1/31/2012	2:57:35 PM	Bypass valve closed
1/31/2012	2:57:35 PM	Bubbler valve closed
1/31/2012	2:57:35 PM	Main Vac valve opened
1/31/2012	2:57:35 PM	Helium MFC set to  0.000000
1/31/2012	2:57:35 PM	H2 MFC set to  0.000000
1/31/2012	2:57:35 PM	BCl3 MFC set to  0.000000
1/31/2012	2:57:35 PM	PH3 MFC set to  0.000000
1/31/2012	2:57:35 PM	SiCl4 MFC set to  0.000000
1/31/2012	2:57:35 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	2:57:35 PM	Tube furnace set to 0
1/31/2012	2:58:05 PM	H2 valve closed
1/31/2012	2:58:05 PM	BCl3 valve closed
1/31/2012	2:58:05 PM	PH3 valve closed
1/31/2012	2:58:05 PM	SiCl4 pre valve closed
1/31/2012	2:58:05 PM	SiCl4 post valve closed
1/31/2012	2:58:05 PM	Bypass valve closed
1/31/2012	2:58:05 PM	Bubbler valve closed
1/31/2012	2:58:05 PM	Helium valve opened
1/31/2012	2:58:05 PM	Main Vac valve opened
1/31/2012	2:58:05 PM	Helium MFC set to  20.000000
1/31/2012	2:58:05 PM	H2 MFC set to  0.000000
1/31/2012	2:58:05 PM	BCl3 MFC set to  0.000000
1/31/2012	2:58:05 PM	PH3 MFC set to  0.000000
1/31/2012	2:58:05 PM	SiCl4 MFC set to  0.000000
1/31/2012	2:58:05 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	2:58:05 PM	Tube furnace set to 0
1/31/2012	2:58:35 PM	Helium valve closed
1/31/2012	2:58:35 PM	H2 valve closed
1/31/2012	2:58:35 PM	BCl3 valve closed
1/31/2012	2:58:35 PM	PH3 valve closed
1/31/2012	2:58:35 PM	SiCl4 pre valve closed
1/31/2012	2:58:35 PM	SiCl4 post valve closed
1/31/2012	2:58:35 PM	Bypass valve closed
1/31/2012	2:58:35 PM	Bubbler valve closed
1/31/2012	2:58:35 PM	Main Vac valve opened
1/31/2012	2:58:35 PM	Helium MFC set to  0.000000
1/31/2012	2:58:35 PM	H2 MFC set to  0.000000
1/31/2012	2:58:35 PM	BCl3 MFC set to  0.000000
1/31/2012	2:58:35 PM	PH3 MFC set to  0.000000
1/31/2012	2:58:35 PM	SiCl4 MFC set to  0.000000
1/31/2012	2:58:35 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	2:58:35 PM	Tube furnace set to 0
1/31/2012	2:59:05 PM	H2 valve closed
1/31/2012	2:59:05 PM	BCl3 valve closed
1/31/2012	2:59:05 PM	PH3 valve closed
1/31/2012	2:59:05 PM	SiCl4 pre valve closed
1/31/2012	2:59:05 PM	SiCl4 post valve closed
1/31/2012	2:59:05 PM	Bypass valve closed
1/31/2012	2:59:05 PM	Bubbler valve closed
1/31/2012	2:59:05 PM	Helium valve opened
1/31/2012	2:59:05 PM	Main Vac valve opened
1/31/2012	2:59:05 PM	Helium MFC set to  20.000000
1/31/2012	2:59:05 PM	H2 MFC set to  0.000000
1/31/2012	2:59:05 PM	BCl3 MFC set to  0.000000
1/31/2012	2:59:05 PM	PH3 MFC set to  0.000000
1/31/2012	2:59:05 PM	SiCl4 MFC set to  0.000000
1/31/2012	2:59:05 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	2:59:05 PM	Tube furnace set to 0
1/31/2012	2:59:35 PM	Helium valve closed
1/31/2012	2:59:35 PM	H2 valve closed
1/31/2012	2:59:35 PM	BCl3 valve closed
1/31/2012	2:59:35 PM	PH3 valve closed
1/31/2012	2:59:35 PM	SiCl4 pre valve closed
1/31/2012	2:59:35 PM	SiCl4 post valve closed
1/31/2012	2:59:35 PM	Bypass valve closed
1/31/2012	2:59:36 PM	Bubbler valve closed
1/31/2012	2:59:36 PM	Main Vac valve opened
1/31/2012	2:59:36 PM	Helium MFC set to  0.000000
1/31/2012	2:59:36 PM	H2 MFC set to  0.000000
1/31/2012	2:59:36 PM	BCl3 MFC set to  0.000000
1/31/2012	2:59:36 PM	PH3 MFC set to  0.000000
1/31/2012	2:59:36 PM	SiCl4 MFC set to  0.000000
1/31/2012	2:59:36 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	2:59:36 PM	Tube furnace set to 0
1/31/2012	3:00:06 PM	H2 valve closed
1/31/2012	3:00:06 PM	BCl3 valve closed
1/31/2012	3:00:06 PM	PH3 valve closed
1/31/2012	3:00:06 PM	SiCl4 pre valve closed
1/31/2012	3:00:06 PM	SiCl4 post valve closed
1/31/2012	3:00:06 PM	Bypass valve closed
1/31/2012	3:00:06 PM	Bubbler valve closed
1/31/2012	3:00:06 PM	Helium valve opened
1/31/2012	3:00:06 PM	Main Vac valve opened
1/31/2012	3:00:06 PM	Helium MFC set to  20.000000
1/31/2012	3:00:06 PM	H2 MFC set to  0.000000
1/31/2012	3:00:06 PM	BCl3 MFC set to  0.000000
1/31/2012	3:00:06 PM	PH3 MFC set to  0.000000
1/31/2012	3:00:06 PM	SiCl4 MFC set to  0.000000
1/31/2012	3:00:06 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	3:00:06 PM	Tube furnace set to 0
1/31/2012	3:00:36 PM	Helium valve closed
1/31/2012	3:00:36 PM	H2 valve closed
1/31/2012	3:00:36 PM	BCl3 valve closed
1/31/2012	3:00:36 PM	PH3 valve closed
1/31/2012	3:00:36 PM	SiCl4 pre valve closed
1/31/2012	3:00:36 PM	SiCl4 post valve closed
1/31/2012	3:00:36 PM	Bypass valve closed
1/31/2012	3:00:36 PM	Bubbler valve closed
1/31/2012	3:00:36 PM	Main Vac valve opened
1/31/2012	3:00:36 PM	Helium MFC set to  0.000000
1/31/2012	3:00:36 PM	H2 MFC set to  0.000000
1/31/2012	3:00:36 PM	BCl3 MFC set to  0.000000
1/31/2012	3:00:36 PM	PH3 MFC set to  0.000000
1/31/2012	3:00:36 PM	SiCl4 MFC set to  0.000000
1/31/2012	3:00:36 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	3:00:36 PM	Tube furnace set to 0
1/31/2012	3:01:06 PM	H2 valve closed
1/31/2012	3:01:06 PM	BCl3 valve closed
1/31/2012	3:01:06 PM	PH3 valve closed
1/31/2012	3:01:06 PM	SiCl4 pre valve closed
1/31/2012	3:01:06 PM	SiCl4 post valve closed
1/31/2012	3:01:06 PM	Bypass valve closed
1/31/2012	3:01:06 PM	Bubbler valve closed
1/31/2012	3:01:06 PM	Helium valve opened
1/31/2012	3:01:06 PM	Main Vac valve opened
1/31/2012	3:01:06 PM	Helium MFC set to  20.000000
1/31/2012	3:01:06 PM	H2 MFC set to  0.000000
1/31/2012	3:01:06 PM	BCl3 MFC set to  0.000000
1/31/2012	3:01:06 PM	PH3 MFC set to  0.000000
1/31/2012	3:01:06 PM	SiCl4 MFC set to  0.000000
1/31/2012	3:01:06 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	3:01:06 PM	Tube furnace set to 0
1/31/2012	3:01:36 PM	Helium valve closed
1/31/2012	3:01:36 PM	H2 valve closed
1/31/2012	3:01:36 PM	BCl3 valve closed
1/31/2012	3:01:36 PM	PH3 valve closed
1/31/2012	3:01:36 PM	SiCl4 pre valve closed
1/31/2012	3:01:36 PM	SiCl4 post valve closed
1/31/2012	3:01:36 PM	Bypass valve closed
1/31/2012	3:01:36 PM	Bubbler valve closed
1/31/2012	3:01:36 PM	Main Vac valve opened
1/31/2012	3:01:36 PM	Helium MFC set to  0.000000
1/31/2012	3:01:36 PM	H2 MFC set to  0.000000
1/31/2012	3:01:36 PM	BCl3 MFC set to  0.000000
1/31/2012	3:01:36 PM	PH3 MFC set to  0.000000
1/31/2012	3:01:36 PM	SiCl4 MFC set to  0.000000
1/31/2012	3:01:36 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	3:01:37 PM	Tube furnace set to 0
1/31/2012	3:01:38 PM	Run finished at 3:01 PM
1/31/2012	3:01:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/31/2012	3:07:10 PM	Main Vac valve closed
1/31/2012	3:07:19 PM	Main Vac valve opened
1/31/2012	3:07:49 PM	Recipe started at 3:07 PM
1/31/2012	3:07:49 PM	Helium valve closed
1/31/2012	3:07:49 PM	H2 valve closed
1/31/2012	3:07:49 PM	BCl3 valve closed
1/31/2012	3:07:49 PM	PH3 valve closed
1/31/2012	3:07:49 PM	SiCl4 pre valve closed
1/31/2012	3:07:49 PM	SiCl4 post valve closed
1/31/2012	3:07:49 PM	Main Vac valve closed
1/31/2012	3:07:49 PM	Bypass valve closed
1/31/2012	3:07:49 PM	Bubbler valve closed
1/31/2012	3:07:49 PM	Helium MFC set to  0.000000
1/31/2012	3:07:49 PM	H2 MFC set to  0.000000
1/31/2012	3:07:49 PM	BCl3 MFC set to  0.000000
1/31/2012	3:07:49 PM	PH3 MFC set to  0.000000
1/31/2012	3:07:49 PM	SiCl4 MFC set to  0.000000
1/31/2012	3:07:49 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	3:07:49 PM	Tube furnace set to 0
1/31/2012	3:07:52 PM	Helium valve closed
1/31/2012	3:07:52 PM	BCl3 valve closed
1/31/2012	3:07:52 PM	PH3 valve closed
1/31/2012	3:07:52 PM	SiCl4 pre valve closed
1/31/2012	3:07:52 PM	SiCl4 post valve closed
1/31/2012	3:07:52 PM	Main Vac valve closed
1/31/2012	3:07:52 PM	Bypass valve closed
1/31/2012	3:07:52 PM	Bubbler valve closed
1/31/2012	3:07:52 PM	H2 valve opened
1/31/2012	3:07:52 PM	Helium MFC set to  0.000000
1/31/2012	3:07:52 PM	H2 MFC set to  500.000000
1/31/2012	3:07:52 PM	BCl3 MFC set to  0.000000
1/31/2012	3:07:52 PM	PH3 MFC set to  0.000000
1/31/2012	3:07:52 PM	SiCl4 MFC set to  0.000000
1/31/2012	3:07:52 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	3:07:53 PM	Tube furnace set to 0
1/31/2012	3:09:01 PM	Helium valve closed
1/31/2012	3:09:01 PM	BCl3 valve closed
1/31/2012	3:09:01 PM	PH3 valve closed
1/31/2012	3:09:01 PM	SiCl4 pre valve closed
1/31/2012	3:09:01 PM	SiCl4 post valve closed
1/31/2012	3:09:01 PM	Main Vac valve closed
1/31/2012	3:09:01 PM	Bypass valve closed
1/31/2012	3:09:01 PM	H2 valve opened
1/31/2012	3:09:01 PM	Bubbler valve opened
1/31/2012	3:09:01 PM	Helium MFC set to  0.000000
1/31/2012	3:09:01 PM	H2 MFC set to  500.000000
1/31/2012	3:09:01 PM	BCl3 MFC set to  0.000000
1/31/2012	3:09:01 PM	PH3 MFC set to  0.000000
1/31/2012	3:09:01 PM	SiCl4 MFC set to  0.000000
1/31/2012	3:09:01 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	3:09:01 PM	Tube furnace set to 0
1/31/2012	3:09:02 PM	Helium valve closed
1/31/2012	3:09:02 PM	BCl3 valve closed
1/31/2012	3:09:02 PM	PH3 valve closed
1/31/2012	3:09:02 PM	SiCl4 pre valve closed
1/31/2012	3:09:02 PM	SiCl4 post valve closed
1/31/2012	3:09:02 PM	Main Vac valve closed
1/31/2012	3:09:02 PM	Bypass valve closed
1/31/2012	3:09:02 PM	H2 valve opened
1/31/2012	3:09:02 PM	Bubbler valve opened
1/31/2012	3:09:02 PM	Helium MFC set to  0.000000
1/31/2012	3:09:02 PM	H2 MFC set to  500.000000
1/31/2012	3:09:02 PM	BCl3 MFC set to  0.000000
1/31/2012	3:09:02 PM	PH3 MFC set to  0.000000
1/31/2012	3:09:02 PM	SiCl4 MFC set to  0.000000
1/31/2012	3:09:02 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	3:09:02 PM	Tube furnace set to 1000
1/31/2012	3:29:02 PM	Helium valve closed
1/31/2012	3:29:02 PM	PH3 valve closed
1/31/2012	3:29:02 PM	Main Vac valve closed
1/31/2012	3:29:02 PM	Bypass valve closed
1/31/2012	3:29:02 PM	H2 valve opened
1/31/2012	3:29:02 PM	BCl3 valve opened
1/31/2012	3:29:02 PM	SiCl4 pre valve opened
1/31/2012	3:29:02 PM	SiCl4 post valve opened
1/31/2012	3:29:02 PM	Bubbler valve opened
1/31/2012	3:29:03 PM	Helium MFC set to  0.000000
1/31/2012	3:29:03 PM	H2 MFC set to  500.000000
1/31/2012	3:29:03 PM	BCl3 MFC set to  1.000000
1/31/2012	3:29:03 PM	PH3 MFC set to  0.000000
1/31/2012	3:29:03 PM	SiCl4 MFC set to  50.000000
1/31/2012	3:29:03 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	3:29:03 PM	Tube furnace set to 1000
1/31/2012	3:49:03 PM	Helium valve closed
1/31/2012	3:49:03 PM	BCl3 valve closed
1/31/2012	3:49:03 PM	PH3 valve closed
1/31/2012	3:49:03 PM	SiCl4 pre valve closed
1/31/2012	3:49:03 PM	SiCl4 post valve closed
1/31/2012	3:49:03 PM	Main Vac valve closed
1/31/2012	3:49:03 PM	Bypass valve closed
1/31/2012	3:49:03 PM	H2 valve opened
1/31/2012	3:49:03 PM	Bubbler valve opened
1/31/2012	3:49:03 PM	Helium MFC set to  0.000000
1/31/2012	3:49:03 PM	H2 MFC set to  500.000000
1/31/2012	3:49:03 PM	BCl3 MFC set to  0.000000
1/31/2012	3:49:03 PM	PH3 MFC set to  0.000000
1/31/2012	3:49:03 PM	SiCl4 MFC set to  0.000000
1/31/2012	3:49:03 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	3:49:03 PM	Tube furnace set to 750
1/31/2012	3:54:03 PM	H2 valve closed
1/31/2012	3:54:03 PM	BCl3 valve closed
1/31/2012	3:54:03 PM	PH3 valve closed
1/31/2012	3:54:03 PM	SiCl4 pre valve closed
1/31/2012	3:54:03 PM	SiCl4 post valve closed
1/31/2012	3:54:03 PM	Main Vac valve closed
1/31/2012	3:54:03 PM	Bypass valve closed
1/31/2012	3:54:03 PM	Helium valve opened
1/31/2012	3:54:03 PM	Bubbler valve opened
1/31/2012	3:54:03 PM	Helium MFC set to  500.000000
1/31/2012	3:54:03 PM	H2 MFC set to  0.000000
1/31/2012	3:54:03 PM	BCl3 MFC set to  0.000000
1/31/2012	3:54:03 PM	PH3 MFC set to  0.000000
1/31/2012	3:54:03 PM	SiCl4 MFC set to  0.000000
1/31/2012	3:54:03 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	3:54:03 PM	Tube furnace set to 0
1/31/2012	3:58:39 PM	Run aborted at 3:58 PM
1/31/2012	3:58:39 PM	Helium valve closed
1/31/2012	3:58:39 PM	H2 valve closed
1/31/2012	3:58:39 PM	BCl3 valve closed
1/31/2012	3:58:39 PM	PH3 valve closed
1/31/2012	3:58:39 PM	SiCl4 pre valve closed
1/31/2012	3:58:39 PM	SiCl4 post valve closed
1/31/2012	3:58:39 PM	Bypass valve closed
1/31/2012	3:58:39 PM	Main Vac valve closed
1/31/2012	3:58:39 PM	Bubbler valve closed
1/31/2012	3:58:39 PM	Helium MFC set to  0.000000
1/31/2012	3:58:39 PM	H2 MFC set to  0.000000
1/31/2012	3:58:39 PM	BCl3 MFC set to  0.000000
1/31/2012	3:58:39 PM	PH3 MFC set to  0.000000
1/31/2012	3:58:39 PM	SiCl4 MFC set to  0.000000
1/31/2012	3:58:39 PM	Tube furnace set to 0
1/31/2012	3:58:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/31/2012	3:58:44 PM	Recipe started at 3:58 PM
1/31/2012	3:58:44 PM	Helium valve closed
1/31/2012	3:58:44 PM	H2 valve closed
1/31/2012	3:58:44 PM	BCl3 valve closed
1/31/2012	3:58:44 PM	PH3 valve closed
1/31/2012	3:58:44 PM	SiCl4 pre valve closed
1/31/2012	3:58:44 PM	SiCl4 post valve closed
1/31/2012	3:58:44 PM	Main Vac valve closed
1/31/2012	3:58:44 PM	Bypass valve closed
1/31/2012	3:58:44 PM	Bubbler valve closed
1/31/2012	3:58:44 PM	Helium MFC set to  0.000000
1/31/2012	3:58:44 PM	H2 MFC set to  0.000000
1/31/2012	3:58:44 PM	BCl3 MFC set to  0.000000
1/31/2012	3:58:44 PM	PH3 MFC set to  0.000000
1/31/2012	3:58:44 PM	SiCl4 MFC set to  0.000000
1/31/2012	3:58:44 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	3:58:44 PM	Tube furnace set to 0
1/31/2012	3:58:47 PM	H2 valve closed
1/31/2012	3:58:47 PM	BCl3 valve closed
1/31/2012	3:58:47 PM	PH3 valve closed
1/31/2012	3:58:47 PM	SiCl4 pre valve closed
1/31/2012	3:58:47 PM	SiCl4 post valve closed
1/31/2012	3:58:47 PM	Main Vac valve closed
1/31/2012	3:58:47 PM	Bypass valve closed
1/31/2012	3:58:47 PM	Bubbler valve closed
1/31/2012	3:58:47 PM	Helium valve opened
1/31/2012	3:58:47 PM	Helium MFC set to  500.000000
1/31/2012	3:58:47 PM	H2 MFC set to  0.000000
1/31/2012	3:58:47 PM	BCl3 MFC set to  0.000000
1/31/2012	3:58:47 PM	PH3 MFC set to  0.000000
1/31/2012	3:58:47 PM	SiCl4 MFC set to  0.000000
1/31/2012	3:58:47 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	3:58:47 PM	Tube furnace set to 0
1/31/2012	3:58:47 PM	Helium valve closed
1/31/2012	3:58:47 PM	H2 valve closed
1/31/2012	3:58:47 PM	BCl3 valve closed
1/31/2012	3:58:47 PM	PH3 valve closed
1/31/2012	3:58:47 PM	SiCl4 pre valve closed
1/31/2012	3:58:47 PM	SiCl4 post valve closed
1/31/2012	3:58:47 PM	Main Vac valve closed
1/31/2012	3:58:47 PM	Bypass valve closed
1/31/2012	3:58:47 PM	Bubbler valve closed
1/31/2012	3:58:47 PM	Helium MFC set to  0.000000
1/31/2012	3:58:47 PM	H2 MFC set to  0.000000
1/31/2012	3:58:47 PM	BCl3 MFC set to  0.000000
1/31/2012	3:58:47 PM	PH3 MFC set to  0.000000
1/31/2012	3:58:47 PM	SiCl4 MFC set to  0.000000
1/31/2012	3:58:47 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	3:58:47 PM	Tube furnace set to 0
1/31/2012	3:58:48 PM	Run finished at 3:58 PM
1/31/2012	3:58:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/31/2012	4:34:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/31/2012	4:34:06 PM	Recipe started at 4:34 PM
1/31/2012	4:34:06 PM	Helium valve closed
1/31/2012	4:34:06 PM	H2 valve closed
1/31/2012	4:34:06 PM	BCl3 valve closed
1/31/2012	4:34:06 PM	PH3 valve closed
1/31/2012	4:34:06 PM	SiCl4 pre valve closed
1/31/2012	4:34:06 PM	SiCl4 post valve closed
1/31/2012	4:34:06 PM	Main Vac valve closed
1/31/2012	4:34:06 PM	Bubbler valve closed
1/31/2012	4:34:06 PM	Bypass valve opened
1/31/2012	4:34:06 PM	Helium MFC set to  0.000000
1/31/2012	4:34:06 PM	H2 MFC set to  0.000000
1/31/2012	4:34:06 PM	BCl3 MFC set to  0.000000
1/31/2012	4:34:06 PM	PH3 MFC set to  0.000000
1/31/2012	4:34:06 PM	SiCl4 MFC set to  0.000000
1/31/2012	4:34:06 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	4:34:06 PM	Tube furnace set to 0
1/31/2012	4:35:13 PM	Helium valve closed
1/31/2012	4:35:13 PM	H2 valve closed
1/31/2012	4:35:13 PM	BCl3 valve closed
1/31/2012	4:35:13 PM	PH3 valve closed
1/31/2012	4:35:13 PM	SiCl4 pre valve closed
1/31/2012	4:35:13 PM	SiCl4 post valve closed
1/31/2012	4:35:13 PM	Main Vac valve closed
1/31/2012	4:35:13 PM	Bubbler valve closed
1/31/2012	4:35:13 PM	Bypass valve opened
1/31/2012	4:35:13 PM	Helium MFC set to  0.000000
1/31/2012	4:35:13 PM	H2 MFC set to  0.000000
1/31/2012	4:35:13 PM	BCl3 MFC set to  0.000000
1/31/2012	4:35:13 PM	PH3 MFC set to  0.000000
1/31/2012	4:35:13 PM	SiCl4 MFC set to  0.000000
1/31/2012	4:35:13 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	4:35:13 PM	Tube furnace set to 0
1/31/2012	4:36:13 PM	Helium valve closed
1/31/2012	4:36:13 PM	H2 valve closed
1/31/2012	4:36:13 PM	BCl3 valve closed
1/31/2012	4:36:13 PM	PH3 valve closed
1/31/2012	4:36:13 PM	SiCl4 pre valve closed
1/31/2012	4:36:13 PM	SiCl4 post valve closed
1/31/2012	4:36:13 PM	Bypass valve closed
1/31/2012	4:36:13 PM	Bubbler valve closed
1/31/2012	4:36:13 PM	Main Vac valve opened
1/31/2012	4:36:13 PM	Helium MFC set to  0.000000
1/31/2012	4:36:13 PM	H2 MFC set to  0.000000
1/31/2012	4:36:13 PM	BCl3 MFC set to  0.000000
1/31/2012	4:36:13 PM	PH3 MFC set to  0.000000
1/31/2012	4:36:13 PM	SiCl4 MFC set to  0.000000
1/31/2012	4:36:13 PM	Bypass solenoid MFC set to  0.000000
1/31/2012	4:36:13 PM	Tube furnace set to 0
1/31/2012	4:36:14 PM	Run finished at 4:36 PM
1/31/2012	4:36:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
